Polysilicon nanowire NEMS fabricated at low temperature for above IC NEMS mass sensing applications

2015 ◽  
Author(s):  
I. Ouerghi ◽  
M. Sansa ◽  
W. Ludurczak ◽  
L. Duraffourg ◽  
K. Benedetto ◽  
...  
Keyword(s):  
Low Temperature ◽  
Mass Sensing ◽  
Sensing Applications

scholarly journals Rapid Growth of TiO2 Nanoflowers via Low-Temperature Solution Process: Photovoltaic and Sensing Applications

Materials ◽  
2019 ◽  
Vol 12 (4) ◽  
pp. 566 ◽  
Author(s):  
M. Akhtar ◽  
Ahmad Umar ◽  
Swati Sood ◽  
InSung Jung ◽  
H. Hegazy ◽  
...  
Keyword(s):  
Low Temperature ◽  
Anatase Phase ◽  
Three Dimensional ◽  
Solution Process ◽  
Dye Sensitized Solar Cell ◽  
Sensor Applications ◽  
Dye Sensitized ◽  
Sensing Applications ◽  
Density Growth ◽  
Temperature Solution

This paper reports the rapid synthesis, characterization, and photovoltaic and sensing applications of TiO2 nanoflowers prepared by a facile low-temperature solution process. The morphological characterizations clearly reveal the high-density growth of a three-dimensional flower-shaped structure composed of small petal-like rods. The detailed properties confirmed that the synthesized nanoflowers exhibited high crystallinity with anatase phase and possessed an energy bandgap of 3.2 eV. The synthesized TiO2 nanoflowers were utilized as photo-anode and electron-mediating materials to fabricate dye-sensitized solar cell (DSSC) and liquid nitroaniline sensor applications. The fabricated DSSC demonstrated a moderate conversion efficiency of ~3.64% with a maximum incident photon to current efficiency (IPCE) of ~41% at 540 nm. The fabricated liquid nitroaniline sensor demonstrated a good sensitivity of ~268.9 μA mM−1 cm−2 with a low detection limit of 1.05 mM in a short response time of 10 s.

An Adaptive Self-Sensing Strategy for Piezoelectrically-Actuated Microcantilevers Used in Ultra-Small Mass Sensing Applications

2006 ◽  
Author(s):  
Miheer Gurjar ◽  
Nader Jalili
Keyword(s):  
Adaptive Estimation ◽  
Equations Of Motion ◽  
Optimization Method ◽  
The Self ◽  
Optimization Approach ◽  
Mass Sensing ◽  
Piezoelectric Patch ◽  
Sensing Applications ◽  
Tip Mass ◽  
Microcantilever Beam

This paper presents a mathematical model of a self-sensing microcantilever beam for mass sensing applications. Equations of motion are derived for a microcantilever beam with a tip mass and a piezoelectric patch actuator deposited on the cantilever surface. In the self-sensing mode, the same piezoelectric patch is used for actuation and sensing. Selfinduced voltage signals, which are extracted using a capacitive bridge mechanism, reveal frequency information of the vibrating beam, which in turn, reveals the particle mass. Equations of motion are obtained using the extended Hamilton's principle by considering the microcantilever as a distributed- parameters system. Two methods to estimate the unknown tip mass are presented. The first one is based on an inverse solution to the characteristic equation problem, while the second method uses a constraint-based optimization approach to estimate the tip mass. To improve the self-sensing performance, the need for adaptive estimation of the piezoelectric capacitance is stressed and an online estimation mechanism is presented. Simulations are presented to demonstrate the ability of the model to detect tip mass up to 0.1 femtogram (1 femtogram = 10-15 gm). Further simulation results demonstrate the working of constraint optimization method and adaptive self-sensing mechanism.

Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications

2007 ◽  
Vol 253 (24) ◽  
pp. 9372-9380 ◽  
Author(s):  
Zhi Yan ◽  
Zhitang Song ◽  
Weili Liu ◽  
Hongxuan Ren ◽  
Ning Gu ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Mass Sensing ◽  
Sensing Applications ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk ◽  
Device Properties

scholarly journals Modeling and Simulation of Triple Coupled Cantilever Sensor for Mass Sensing Applications

2015 ◽  
Vol 5 (3) ◽  
pp. 403 ◽  
Author(s):  
Nalluri Siddaiah ◽  
D.V. Rama Koti Reddy ◽  
Y. Bhavani Sankar ◽  
R. Anil Kumar ◽  
Hossein Pakdast
Keyword(s):  
Resonant Frequency ◽  
Simulation Software ◽  
Mass Sensing ◽  
Modeling And Analysis ◽  
Critical Dimensions ◽  
Cantilever Sensors ◽  
Sensing Applications ◽  
Cantilever Sensor ◽  
Modeling Techniques ◽  
Mass Detector

Cantilever sensors have been the growing attention in last decades and their use as a mass detector. This work presents design, modeling and analysis of Triple coupled cantilever(TCC) sensor using MEMS simulation software Comsol Multiphysics with critical  dimensions of 100μm length,20μm width and 2μm thickness. Simulations were performed based on finite element modeling techniques, where different resonant frequencies were observed for different modes of operation. It is also observed that the resonant frequency of the sensor decreases as some mass is applied on one particular cantilever. The various parameters greatly affecting the performance of TCC such as resonant frequency, dimensions, material and pressure or force applied on it.we also observed that while adding some mass on any one lateral cantilever, the resonant frequency of that respective mode reduced.

Mechanical quality factor of microcantilevers for mass sensing applications

2007 ◽  
Author(s):  
Jian Lu ◽  
Tsuyoshi Ikehara ◽  
Yi Zhang ◽  
Takashi Mihara ◽  
Ryutaro Maeda
Keyword(s):  
Quality Factor ◽  
Mechanical Quality Factor ◽  
Mass Sensing ◽  
Sensing Applications ◽  
Mechanical Quality
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