MEMS-Based Cantilever Sensor for Simultaneous Measurement of Mass and Magnetic Moment of Magnetic Particles

This study presents a measurement approach suitable for the simultaneous determination of both the mass mp and magnetic moment µp of magnetic particles deposited on a micro electro mechanical system (MEMS) resonant cantilever balance, which is operated in parallel to an external magnetic field-induced force gradient F′(z). Magnetic induction B(z) and its second spatial derivative δ2B/δz2 is realized, beforehand, through the finite element method magnetics (FEMM) simulation with a pair of neodymium permanent magnets configured in a face-to-face arrangement. Typically, the magnets are mounted in a magnet holder assembly designed and fabricated in-house. The resulting F′ lowers the calibrated intrinsic stiffness k0 of the cantilever to k0-F′, which can, thus, be obtained from a measured resonance frequency shift of the cantilever. The magnetic moment µp per deposited particle is determined by dividing F′ by δ2B/δz2 and the number of the attached monodisperse particles given by the mass-induced frequency shift of the cantilever. For the plain iron oxide particles (250 nm) and the magnetic polystyrene particles (2 µm), we yield µp of 0.8 to 1.5 fA m2 and 11 to 19 fA m2 compared to 2 fA m2 and 33 fA m2 nominal values, respectively.

Precise Design of Micro-Cantilever Sensor for Biomedical Application

This research evaluates the impact of mass loading/perturbations on the characteristics of a micro-size cantilever bio-mass sensor. Design techniques are proposed through the application of the commercial, finite element modelling, and simulation package, i.e., COMSOL multiphysics. A finite element model and resulting simulations are provided for both the static and dynamic operation of a bio-mass sensor. In static mode, the obtained result provides the structural stress, strain, and displacement of a sensor against several mass loading conditions (point, edge, and boundary). In dynamic mode, shifts in the resonant frequencies of the sensor as a function of mass loading are obtained, which is another viable output of the biosensor. The proposed design and modelling techniques offer a guide in the rapid design and development of precise and efficient biomedical instrumentations and/or products.

Dynamic Response of PVDF Cantilever Due to Droplet Impact Using an Electromechanical Model

The dynamic response of a polyvinylidene fluoride (PVDF) cantilever beam under excitation of water droplet impact is investigated by developing an electromechanical model. In the model, the governing equations of beam motion and output voltage are derived in the theoretical way, such that the voltage across the PVDF layer and the cantilever deflection can be predicted. The motion of the beam is described by the multi-mode vibration model through which more accurate results can be obtained. The predicted results of the model are validated by the experiment. Combined with the experiment and the model, the effect of surface wettability on droplet-substrate interaction mechanisms is investigated, which provides an insight into the improvement of mechanical-to-electrical energy conversion efficiency in raindrop energy harvesting (REH) applications. Results show: (1) the droplet splash on a super-hydrophobic beam surface has a positive effect on voltage generation. The splash limit that affects the reaction force of the impacting droplet is experimentally determined and greatly dominant by the Weber number. (2) Small-scaled droplets in splash regime allow generating higher voltage output from a super-hydrophobic beam surface than from an untreated hydrophilic beam surface. (3) Tests of successive droplet impacts also show that a super-hydrophobic surface performs better over a hydrophilic surface by producing constant peak voltage and higher electrical energy harvested. In this case, the voltage measured from the hydrophilic surface decreases gradually as the water layer is accumulated. Overall, the electromechanical behaviors of a super-hydrophobic PVDF cantilever sensor can be well predicted by the model which shows a great potential in energy harvesting by maximizing the inelastic collision upon droplet-substrate interactions.