MEMS Resonant Temperature Sensing with Variable Coupling Stiffness and Improved Sensitivity

Author(s):  
Ertug Simsek ◽  
Kivanc Azgin
1997 ◽  
Vol 503 ◽  
Author(s):  
Yongxia Zhang ◽  
Yanwei Zhang ◽  
Juliana Blaser ◽  
T. S. Sriiram ◽  
R. B. Marcus

ABSTRACTA thermal microprobe has been designed and built for high resolution temperature sensing. The thermal sensor is a thin-film thermocouple junction at the tip of an Atomic Force Microprobe (AFM) silicon probe needle. Only wafer-stage processing steps are used for the fabrication. The thermal response over the range 25–s 4.5–rovolts per degree C and is linear.


2021 ◽  
pp. 130599
Author(s):  
Yabing Wang ◽  
Miaomiao Zhu ◽  
Xuedian Wei ◽  
Jianyong Yu ◽  
Zhaoling Li ◽  
...  

Author(s):  
Karolina Kniec ◽  
Wojciech Piotrowski ◽  
Karolina A Ledwa ◽  
Markus Suta ◽  
Luis Antonio Dias Carlos ◽  
...  

Luminescence (nano)thermometry is an emerging and promising field for remote temperature sensing and thermal imaging of both the surface and interior of objects. While the field is dominated by trivalent...


Author(s):  
Anton O. Chernutsky ◽  
Dmitriy A. Dvoretskiy ◽  
Ilya O. Orekhov ◽  
Stanislav G. Sazonkin ◽  
Yan Zh. Ososkov ◽  
...  

2021 ◽  
pp. 112734
Author(s):  
Mahsa Habibi ◽  
Pooya Bagheri ◽  
Nahid Ghazyani ◽  
Hossein Zare-Behtash ◽  
Esmaeil Heydari

CrystEngComm ◽  
2021 ◽  
Author(s):  
Hu Huang ◽  
Lingqiong Wu ◽  
Shengbin Cheng ◽  
Xiaofeng Wu ◽  
Shiping Zhan ◽  
...  

The response rate of optical temperature sensing of upconversion nanoparticles is significantly improved by coupling with Ag@C@Ag nanoparticles which have excellent thermal conductivity.


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