Comparative study on effective electron mobility in FinFETs with a (111) channel surface fabricated by wet and dry etching processes

Author(s):  
Y.X. Liu ◽  
B. Sugimata ◽  
M. Masahara ◽  
K. Ishii ◽  
K. Endo ◽  
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Ajay Kumar Visvkarma ◽  
Chandan Sharma ◽  
Robert Laishram ◽  
Sonalee Kapoor ◽  
D. S. Rawal ◽  
...  

2006 ◽  
Vol 245-246 (1) ◽  
pp. 430-434
Author(s):  
Taís Moreira ◽  
Shirley Possidonio ◽  
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2014 ◽  
Vol 61 (11) ◽  
pp. 3601-3607 ◽  
Author(s):  
Ralf Granzner ◽  
Vladimir M. Polyakov ◽  
Christian Schippel ◽  
Frank Schwierz

2002 ◽  
Vol 41 (Part 1, No. 7A) ◽  
pp. 4521-4522 ◽  
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Shin-ich Saito ◽  
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