Comparative study on effective electron mobility in FinFETs with a (111) channel surface fabricated by wet and dry etching processes
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1992 ◽
Vol 10
(6)
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pp. 2949
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2006 ◽
Vol 21
(6)
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pp. 781-785
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2014 ◽
Vol 61
(11)
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pp. 3601-3607
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2002 ◽
Vol 41
(Part 1, No. 7A)
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pp. 4521-4522
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2008 ◽
Vol 147
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pp. 98-102
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