A high temperature MEMS heater for optical sensors

2011 ◽  
Author(s):  
Jing-Yuan Lin ◽  
Yu-Sheng Hsieh ◽  
Shang-Chian Su
Keyword(s):  
High Temperature ◽  
Optical Sensors ◽  
Mems Heater

scholarly journals Synthesis of high-performance magnetic garnet materials and garnet-bismuth oxide nanocomposites using physical vapor deposition followed by high-temperature crystallization

2011 ◽  
Vol 83 (11) ◽  
pp. 1971-1980 ◽  
Author(s):  
Mohammad Nur-E-Alam ◽  
Mikhail Vasiliev ◽  
Kamal Alameh ◽  
Viacheslav Kotov
Keyword(s):  
High Temperature ◽  
Optical Sensors ◽  
Physical Vapor Deposition ◽  
High Performance ◽  
Near Infrared ◽  
Rf Sputtering ◽  
Nanocomposite Films ◽  
Sputtering Deposition ◽  
Garnet Phase ◽  
Iron Garnet

Bi-substituted iron garnet (Bi:IG) compounds synthesized in thin film form are the best semi-transparent magneto-optical (MO) materials for applications in magnetic recording, optical sensors, and photonics. These materials can possess attractive magnetic properties and the highest specific Faraday rotation in the visible and near-infrared spectral regions, if the deposited layers contain a high volumetric fraction of the garnet phase and possess high-quality surfaces and microstructure. In this paper, we study the effects of various deposition and annealing process parameters on the properties of Bi:IG and garnet-oxide nanocomposite films of several composition types fabricated using radio-frequency (RF) sputtering deposition followed by high-temperature isothermal crystallization. We also investigate the kinetics of garnet phase formation within a garnet-Bi-oxide nanocomposite material.

A high-temperature MEMS heater using suspended silicon structures

2009 ◽  
Vol 19 (11) ◽  
pp. 115011 ◽  
Author(s):  
Kook-Nyung Lee ◽  
Dae-Sung Lee ◽  
Suk-Won Jung ◽  
Yun-Ho Jang ◽  
Yong-Kweon Kim ◽  
...  
Keyword(s):  
High Temperature ◽  
Silicon Structures ◽  
Mems Heater

Packaged Optical Sensors Based on Regenerated Fiber Bragg Gratings for High Temperature Applications

2012 ◽  
Vol 12 (1) ◽  
pp. 107-112 ◽  
Author(s):  
David Barrera ◽  
Vittoria Finazzi ◽  
Joel Villatoro ◽  
Salvador Sales ◽  
Valerio Pruneri
Keyword(s):  
High Temperature ◽  
Optical Sensors ◽  
Fiber Bragg Gratings ◽  
Bragg Gratings ◽  
Temperature Applications

scholarly journals Switchable Metasurface with VO2 Thin Film at Visible Light by Changing Temperature

Photonics ◽  
2021 ◽  
Vol 8 (2) ◽  
pp. 57 ◽  
Author(s):  
Jin-Kyu Yang ◽  
Hyeon-Seok Jeong
Keyword(s):  
High Temperature ◽  
Low Temperature ◽  
Optical Sensors ◽  
Beam Steering ◽  
Incident Light ◽  
Visible Region ◽  
Polarization Conversion ◽  
Temperature Dependent ◽  
Beamforming Antennas ◽  
Change Material

We numerically demonstrated switchable metasurfaces using a phase change material, VO2 by temperature change. The Pancharatnam–Berry metasurface was realized by using an array of Au nanorods on top of a thin VO2 film above an Au film, where the optical property of the VO2 film is switched from the insulator phase at low temperature to the metal phase at high temperature. At the optimal structure, polarization conversion efficiency of the normal incident light is about 75% at low temperature while that is less than 0.5% at high temperature in the visible region (λ∼ 700 nm). Various functionalities of switchable metasurfaces were demonstrated such as polarization conversion, beam steering, Fourier hologram, and Fresnel hologram. The thin-VO2-film-based switchable metasurface can be a good candidate for various switchable metasurface devices, for example, temperature dependent optical sensors, beamforming antennas, and display.

High Temperature (800°C) MEMS Pressure Sensor Development Including Reusable Packaging for Rocket Engine Applications

2006 ◽  
Author(s):  
So¨ren Fricke ◽  
Alois Friedberger ◽  
Thomas Ziemann ◽  
Eberhard Rose ◽  
Gerhard Mu¨ller ◽  
...  
Keyword(s):  
High Temperature ◽  
Tin Oxide ◽  
Optical Sensors ◽  
Research Work ◽  
Cost Driver ◽  
Maximum Temperature ◽  
Gauge Factor ◽  
Harsh Environment ◽  
Rocket Engines ◽  
Mems Device

For aircraft and rocket engines there is a strong need to measure the pressure in the propulsion system at high temperature (HT) with a high local resolution. Miniaturized sensor elements commercially available show decisive disadvantages. With piezoelectric-based sensors working clearly above 500°C static pressures can not be measured. Optical sensors are very expensive and require complex electronics. SiC sensor prototypes are operated up to 650°C, but require high technological efforts. The present approach is based on resistors placed on top of a 2 mm diameter sapphire membrane (8 mm chip diameter). The strain gauges are made either of antimony doped tin oxide (SnO2:Sb) or platinum (Pt). This material combination allows for matching the thermal coefficients of expansion (TCE) of the materials involved. The morphology of the SnO2:Sb layer can be optimized to reduce surface roughness on the nanometer scale and hence, gas sensitivity. Antimony doping increases conductivity, but decreases the gauge factor. With this nanotechnological knowledge it is possible to adjust the material properties to the needs of our aerospace applications. Tin oxide was shown to be very stable at HT. We also measured a 2.5% change in electrical resistivity at room temperature at maximum membrane deflection. The maximum temperature coefficient of resistivity (TCR) is less than 3.5·10−4 K−1 in the temperature range between 25°C and 640°C. In addition to the device related research work, a novel reusable packaging concept is developed as housing is the main cost driver. After the chip is destroyed the functional device can simply be replaced — housing and contacts can be reused. The MEMS device is electrically contacted with a miniaturized spring mechanism. It is loaded from the harsh environment side into the HT stable metal housing. A cap is screwed into the housing and compresses the inserted seal ring against the chip. The part for electrical contacting on the opposite housing side is not disassembled. The MEMS device is not in direct contact with the housing material, but embedded between two adaptive layers of the same material as the device (sapphire) to decrease thermally induced mechanical stress. Overall weight is 46 g. This packaging concept has been successfully optimized so that the whole assembly can withstand 800°C and simultaneously provides sealing up to 250 bar! After testing in such harsh environment, the small packaging can still be unscrewed to exchange the MEMS device. Due to the reutilization, the packaging can be used far beyond the lifetime of HT MEMS devices.

Strontium cobaltite coated optical sensors for high temperature carbon dioxide detection

2010 ◽  
Vol 144 (1) ◽  
pp. 260-266 ◽  
Author(s):  
Xiaotong Wei ◽  
Tao Wei ◽  
Jiansheng Li ◽  
Xinwei Lan ◽  
Hai Xiao ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
High Temperature ◽  
Optical Sensors ◽  
Carbon Dioxide Detection

A Novel Micro Heater Integrated on Flexible Polyimide Substrate With Fast Response and Uniform Temperature Distribution

2015 ◽  
Author(s):  
Shifeng Yu ◽  
Shuyu Wang ◽  
Ming Lu ◽  
Lei Zuo
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Temperature Distribution ◽  
Vanadium Oxide ◽  
Fast Response ◽  
Uniform Temperature ◽  
Polyimide Substrate ◽  
Uniform Temperature Distribution ◽  
Mems Heater ◽  
Temperature Coefficient Of Resistivity

This paper presents a novel micro heater prepared on polyimide thin film with fast response and ultra-uniform temperature distribution in the heating area. The transparent polyimide thin film was fabricated by spin-coating, baking and curing the liquid polyimide on the silicon wafer. A gold heater together with the vanadium oxide based thermistor was integrated on the polyimide thin film. Due to the low thermal conductivity of the polyimide thin film, the MEMS heater could reach high temperature with low power consumption and fast response time. FEA method was applied to optimize the shape of the gold heater to achieve uniform temperature distribution along the heating area. A copper island was also deposited on the back of the heater to improve the uniformity of the temperature distribution. The vanadium oxide based temperature sensor with a high temperature coefficient of resistivity as 2.4% was used for the temperature sensing. The temperature variation among the heating area is less than 0.2°C.

SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

2007 ◽  
Vol 124 (2) ◽  
pp. 421-428 ◽  
Author(s):  
J. Spannhake ◽  
A. Helwig ◽  
G. Müller ◽  
G. Faglia ◽  
G. Sberveglieri ◽  
...  
Keyword(s):  
High Temperature ◽  
New Material ◽  
Mems Heater
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