Power Output Force Generation by a MEMS Phase Change Actuator
2011 ◽
Vol 20
(6)
◽
pp. 1287-1297
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2001 ◽
Vol 281
(6)
◽
pp. L1402-L1412
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Keyword(s):
Keyword(s):
1994 ◽
Vol 11
(1)
◽
pp. 71-85
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Keyword(s):
2005 ◽
Vol 2005.9
(0)
◽
pp. 51-52
2009 ◽
Vol 87
(3)
◽
pp. 203-210
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Keyword(s):
2014 ◽
Vol 65
(9)
◽
pp. 825-843
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1989 ◽
Vol 47
◽
pp. 574-575
Keyword(s):
Keyword(s):