Impact of Current Flow Shape in Tapered (Versus Rectangular) FinFET on Threshold Voltage Variation Induced by Work-Function Variation

2014 ◽  
Vol 61 (6) ◽  
pp. 2007-2011 ◽  
Author(s):  
Hyohyun Nam ◽  
Changhwan Shin
2019 ◽  
Vol 14 (1) ◽  
pp. 1-6
Author(s):  
Alberto Vinícius Oliveira ◽  
Guilherme Vieira Gonçalves ◽  
Paula Ghedini Der Agopian ◽  
João Antonio Martino ◽  
Jérôme Mitard ◽  
...  

The implementation of a barrier potential layer underneath the channel region, well known as Ground Plane (GP) implantation, and its influence on the performance of relaxed germanium pFinFET devices is investigated in this manuscript. This study aims to explain the fin width dependence of the threshold voltage from experimental data and evaluates the ground plane doping concentration and its depth influence on relaxed p-type channel germanium FinFET parameters, as threshold voltage, transconductance and subthreshold swing, through Technology Computer-Aided Design (TCAD) numerical simulations. The threshold voltage variation reaches up to 80 mV from the narrowest device to the widest one, considering the studied range of ground plane doping concentration. Concerning the subthreshold swing parameter, neither the GP doping concentration, nor its depth play a significant role since the electrostatic coupling is predominant.


2020 ◽  
Vol 41 (3) ◽  
pp. 373-376
Author(s):  
Sanghyun Ban ◽  
Hyejung Choi ◽  
Wootae Lee ◽  
Seokman Hong ◽  
Hwanjun Zang ◽  
...  

2001 ◽  
Vol 48 (9) ◽  
pp. 1995-2001 ◽  
Author(s):  
K. Takeuchi ◽  
R. Koh ◽  
T. Mogami

2008 ◽  
Vol 21 (1) ◽  
pp. 33-40 ◽  
Author(s):  
Rouwaida Kanj ◽  
Rajiv V. Joshi ◽  
Jayakumaran Sivagnaname ◽  
Jente B. Kuang ◽  
Dhruva Acharyya ◽  
...  

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