Genetic Algorithm for the Design of Freeform Geometries in a MEMS Accelerometer Comprising a Mechanical Motion Pre-Amplifier

AbstractThis paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved.

Download Full-text

MEMS Accelerometer Design Optimization Using Genetic Algorithm

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.705.288 ◽

2013 ◽

Vol 705 ◽

pp. 288-294 ◽

Cited By ~ 3

Author(s):

V.S. Krushnasamy ◽

A. Vimala Juliet

Keyword(s):

Genetic Algorithm ◽

Design Optimization ◽

High Efficiency ◽

Microelectromechanical Systems ◽

Optimal Parameter ◽

Low Cost ◽

Complex Nature ◽

Mems Accelerometer ◽

Mems Technology ◽

Parameter Values

MEMS (Microelectromechanical Systems) refers to the technology integrating electrical and mechanical components with feature size of 1~1000 microns. Due to its small size, low cost, low power consumption and high efficiency, MEMS technology has been widely used in many fields.In this paper,the design optimization of MEMS accelerometer is discussed.The main objective of this investigation is to find a optimum design of MEMS,which satisfies a set of given constraints. The accelerometer employs a double folded beam flexure system and the mass being displaced is the proof mass.Due to the complex nature of the problem,a genetic algorithm (GA) is developed for the optimization of MEMS.The GA attempts to minimize the die area and so the four optimal parameter values can be determined. MEMS accelerometers can be used in air-bag deployment systems in automobiles.The experimental results will show the optimal design of MEMS.

Download Full-text

Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.101-102.530 ◽

2011 ◽

Vol 101-102 ◽

pp. 530-533 ◽

Cited By ~ 1

Author(s):

Yu Liu ◽

Hong Yun Yang ◽

Guo Chao Wang

Keyword(s):

Genetic Algorithm ◽

Design Optimization ◽

Multidisciplinary Design Optimization ◽

Multidisciplinary Optimization ◽

Multidisciplinary Design ◽

Mems Accelerometer ◽

Global Criterion ◽

Global Criterion Method ◽

Detection Circuit ◽

Adhesion Factor

Multidisciplinary design optimization of a biaxial capacitive micro-accelerometer with the crab-leg flexural suspension is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method. Furthermore, genetic algorithm is applied to obtain the multi-objective optimum of the proposed multidisciplinary design model.

Download Full-text