Tribological Behavior of Cubic Boron Nitride Film Sliding Against Diamond

1995 ◽  
Vol 117 (4) ◽  
pp. 629-633 ◽  
Author(s):  
Shuichi Watanabe ◽  
Shojiro Miyake ◽  
Masao Murakawa

Cubic boron nitride (c-BN) film was deposited onto a silicon substrate by means of a magnetically enhanced plasma ion plating method utilizing a hot cathode plasma discharge in parallel magnetic field. In this study, the friction and wear behaviors of the c-BN film, particularly when it came into sliding contact with diamond, were investigated using a reciprocating tribometer in an applied normal load range of 0.1 ~ 4.9 N. The results showed that the friction coefficient of the c-BN film sliding against the diamond indenter tended to decrease as the load increased, and was very low, exhibiting values of 0.03 ~ 0.065 at the maximum load of 4.9 N. Furthermore, the study confirmed that the friction coefficient of annealed c-BN film was lower than that of as-deposited c-BN film throughout the whole load range. Judging from the results of comparable investigations in which c-BN film came into contact with other materials such as c-BN compact, SiC and stainless steel, the wear performance and peeling resistance of the c-BN film proved to be significantly better in the case of contact with diamond.

2009 ◽  
Vol 58 (2) ◽  
pp. 1364
Author(s):  
Yang Hang-Sheng ◽  
Nie An-Min ◽  
Zhang Jian-Ying

1997 ◽  
Vol 21 (2) ◽  
pp. 47-100 ◽  
Author(s):  
P.B. Mirkarimi ◽  
K.F. McCarty ◽  
D.L. Medlin

1996 ◽  
Vol 79 (8) ◽  
pp. 4381 ◽  
Author(s):  
Takanori Ichiki ◽  
Satoshi Amagi ◽  
Toyonobu Yoshida

1996 ◽  
Vol 03 (01) ◽  
pp. 1051-1057 ◽  
Author(s):  
H. KOHZUKI ◽  
M. MOTOYAMA ◽  
T. KANEYOSHI ◽  
Y. KOWADA ◽  
J. KAWAI ◽  
...  

Cubic boron-nitride (c-BN) films were deposited on a silicon substrate by varying the deposition time, using a reactive ion-plating method. In order to investigate the growth mechanism of c-BN films, these c-BN films were characterized by x-ray emission spectra of boron (B K x-ray emission spectra), infrared absorption spectra, selected area diffraction patterns, and TEM microstructures. It was found that the BN film with sp2 bonding formed initially on the substrate and subsequently c-BN film formed. The c-BN film was composed of fine crystallites with a size of about 10 nm and with random orientation. In the case of the B K x-ray emission spectrum from the BN film with sp 2 bonding, the intensity of the satellite peak at the short-wavelength side was extremely stronger than that of sp 2-bonded BN-like turbostratic or hexagonal BN. As a result of calculation of the B K x-ray emission spectrum of BN using the discrete variational Hartree-Fock-Slater (DV-Xα) method, it was found that the satellite peak intensity increased with formation of the fine BN cluster having two-coordinated boron (which has a dangling bond) and with decreasing size of the cluster. Therefore, it is considered that the BN film with sp 2 bonding was composed of the very fine BN cluster having two-coordinated borons, and became the precursor of c-BN film at the interface between the substrate and c-BN film.


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