A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors

1992 ◽  
Vol 114 (3) ◽  
pp. 362-369 ◽  
Author(s):  
J. Ni ◽  
P. S. Huang ◽  
S. M. Wu
Keyword(s):  
Laser Beam ◽  
Simultaneous Measurement ◽  
Degree Of Freedom ◽  
Angular Error ◽  
Measuring System ◽  
Geometric Errors ◽  
Measurement Quality ◽  
Laser Alignment ◽  
Straightness Error ◽  
Better Than

A precision multi-degree-of-freedom measuring (MDFM) system has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw, and roll errors of the moving axes of a CMM. The system is based on the principles of laser alignment and autocollimator. Its measurement principles and the influence of laser beam drifts on its measurement quality have been investigated and some improvement schemes have been implemented. Through the measurements of actual as well as artificially created geometric errors of the CMM, it has been found that the system’s accuracy of measuring straightness error components is better than 1 μm and its accuracy for angular error measurements is better than 0.5 arcsec.

Development of a Measuring System for the Measurement of Motions Errors of a Linear Stage

2004 ◽  
Author(s):  
Wen-Yuh Jywe ◽  
Chien-Hung Liu ◽  
Sheng-Chung Tzeng ◽  
Po Chou ◽  
Chu-Wei Lin
Keyword(s):  
Measuring Method ◽  
Degree Of Freedom ◽  
Angular Error ◽  
Measuring System ◽  
Linear Stage ◽  
Process Verification ◽  
Error Components ◽  
Dual Beam ◽  
Six Degree Of Freedom ◽  
Straightness Error

A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.

scholarly journals Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool

Sensors ◽  
2018 ◽  
Vol 19 (1) ◽  
pp. 5 ◽  
Author(s):  
Chien-Sheng Liu ◽  
Jia-Jun Lai ◽  
Yong-Tai Luo
Keyword(s):  
Degree Of Freedom ◽  
Geometric Errors ◽  
Light Path ◽  
Linear Guide ◽  
Positioning Errors ◽  
Speed Up ◽  
Analysis Design ◽  
Six Degree Of Freedom ◽  
Straightness Error ◽  
The Mathematical Model

This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 μm, and ±2.3 μm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 μm, 0.3 μm, and 3 μm, respectively.

Parameter calibration of 6-degree-of-freedom parallel mechanism based on orthogonal displacement measuring system

Optik ◽  
2021 ◽  
Vol 226 ◽  
pp. 165806
Author(s):  
Yang Liwei ◽  
Fan Yanchao ◽  
Chai Fangmao ◽  
Pang Xinyuan ◽  
Dong deyi
Keyword(s):  
Parallel Mechanism ◽  
Degree Of Freedom ◽  
Measuring System ◽  
Parameter Calibration

scholarly journals On the optimal control force applied to tuned mass dampers for multi-degree-of-freedom systems

2004 ◽  
Vol 26 (1) ◽  
pp. 1-10
Author(s):  
Nguyen Dong Anh ◽  
Nguyen Chi Sang
Keyword(s):  
Optimal Control ◽  
Numerical Study ◽  
Degree Of Freedom ◽  
Control Force ◽  
Linear Quadratic ◽  
Tuned Mass Dampers ◽  
Coloured Noise ◽  
Optimal Theory ◽  
The One ◽  
Better Than

The design of active TMD for multi-degree-of-freedom systems subjected to second order coloured noise excitation is considered using the linear quadratic optimal theory. A detailed numerical study is carried out for a 2-DOF system. It is shown that the effectiveness of active TMD is better than the one of passive TMD.

scholarly journals Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

2020 ◽  
Vol 10 (15) ◽  
pp. 5057
Author(s):  
Chuang Sun ◽  
Sheng Cai ◽  
Yusheng Liu ◽  
Yanfeng Qiao
Keyword(s):  
Simultaneous Measurement ◽  
Measurement Accuracy ◽  
Measurement Data ◽  
Optical Path ◽  
Degree Of Freedom ◽  
Experimental Setup ◽  
Collimation System ◽  
Optical Configuration ◽  
Series Of Experiments ◽  
The Common

A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are ± 2.5 ″ and ± 3.5 ″ without correction, and the residuals are ± 1.9 ″ and ± 2.8 ″ after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from ± 4.8   μ m to ± 2.8 μm and ± 5.9 μm to ± 3.6 μm, respectively. The comparison deviation of the roll is ± 4.3 ″ . The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.

A new method for measuring laser beam straightness error based on common-path compensation

2009 ◽  
Vol 5 (5) ◽  
pp. 383-386 ◽  
Author(s):  
Feng-ling You ◽  
Qi-bo Feng ◽  
Bin Zhang ◽  
Yu-sheng Zhai ◽  
Rui Cao ◽  
...  
Keyword(s):  
Laser Beam ◽  
New Method ◽  
Common Path ◽  
Straightness Error
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