Surface Acoustic Wave Band Gaps and Phononic Structures on Thin Solid Plates

2005 ◽  
Author(s):  
Xinya Zhang ◽  
Ted Jackson ◽  
Emmanuel Lafound ◽  
Pierre Deymier ◽  
Jerome Vasseur
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Phononic Crystal ◽  
Surface Acoustic Waves ◽  
Phononic Crystals ◽  
Band Gaps ◽  
Laser Ultrasonics ◽  
Thin Plates ◽  
Wave Band

Novel phononic crystal structures on thin plates for material science applications in ultrasonic range (~ MHz) are described. Phononic crystals are created by a periodic arrangement of two or more materials displaying a strong contrast in their elastic properties and density. Because of the artificial periodic elastic structures of phononic crystals, there can exist frequency ranges in which waves cannot propagate, giving rise to phononic band gaps which are analogous to photonic band gaps for electromagnetic waves in the well-documented photonic crystals. In the past decades, the phononic structures and acoustic band gaps based on bulk materials have been researched in length. However few investigations have been performed on phononic structures on thin plates to form surface acoustic wave band gaps. In this presentation, we report a new approach: patterning two dimensional membranes to form phononic crystals, searching for specific acoustic transport properties and surface acoustic waves band gaps through a series of deliberate designs and experimental characterizations. The proposed phononic crystals are numerically simulated through a three-dimensional plane wave expansion (PWE) method and experimentally characterized by a laser ultrasonics instrument that has been developed in our laboratory.

Evidence of surface acoustic wave band gaps in the phononic crystals created on thin plates

2006 ◽  
Vol 88 (4) ◽  
pp. 041911 ◽  
Author(s):  
Xinya Zhang ◽  
Ted Jackson ◽  
Emmanuel Lafond ◽  
Pierre Deymier ◽  
Jerome Vasseur
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Phononic Crystals ◽  
Band Gaps ◽  
Thin Plates ◽  
Wave Band

Locally resonant surface acoustic wave band gaps in a two-dimensional phononic crystal of pillars on a surface

2010 ◽  
Vol 81 (21) ◽  
Author(s):  
Abdelkrim Khelif ◽  
Younes Achaoui ◽  
Sarah Benchabane ◽  
Vincent Laude ◽  
Boujamaa Aoubiza
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Phononic Crystal ◽  
Band Gaps ◽  
Wave Band ◽  
Two Dimensional

scholarly journals Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Inertial Sensors ◽  
Surface Acoustic Waves ◽  
Sensing Element ◽  
Small Series ◽  
Evaporation Technique ◽  
Photolithography Process

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

scholarly journals Influence of Waterproof Films on the Atomization Behavior of Surface Acoustic Waves

Micromachines ◽  
2019 ◽  
Vol 10 (11) ◽  
pp. 794 ◽  
Author(s):  
Huang ◽  
Hu ◽  
Han ◽  
Lei ◽  
Yang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Short Circuit ◽  
Surface Acoustic Waves ◽  
Film Coating ◽  
Experimental Results ◽  
Commercial Application

One of the reasons why commercial application of surface acoustic wave (SAW) atomization is not possible is due to the condensation of aerosol droplets generated during atomization, which drip on the interdigitated transducer (IDT), thereby causing electrodes to short-circuit. In order to solve this problem, a SU-8-2002 film coating on an IDT is proposed in this paper. The waterproof performance of the film coating was tested on a surface acoustic wave (SAW) device several times. The experimental results reveal that the film coating was robust. The experiment also investigated the effects of the SU-8-2002 film on atomization behavior and heating.

Full Band-Gap Silicon Phononic Crystals for Surface Acoustic Waves

2006 ◽  
Author(s):  
Saeed Mohammadi ◽  
Abdelkrim Khelif ◽  
Ryan Westafer ◽  
Eric Massey ◽  
William D. Hunt ◽  
...  
Keyword(s):  
Band Gap ◽  
Acoustic Waves ◽  
Phononic Crystal ◽  
Surface Acoustic Waves ◽  
Hexagonal Lattice ◽  
Phononic Crystals ◽  
Bulk Wave ◽  
Filling Fraction ◽  
Phononic Band Gap ◽  
Wide Range

Periodic elastic structures, called phononic crystals, show interesting frequency domain characteristics that can greatly influence the performance of acoustic and ultrasonic devices for several applications. Phononic crystals are acoustic counterparts of the extensively-investigated photonic crystals that are made by varying material properties periodically. Here we demonstrate the existence of phononic band-gaps for surface acoustic waves (SAWs) in a half-space of two dimensional phononic crystals consisting of hexagonal (honeycomb) arrangement of air cylinders in a crystalline Silicon background with low filling fraction. A theoretical calculation of band structure for bulk wave using finite element method is also achieved and shows that there is no complete phononic band gap in the case of the low filling fraction. Fabrication of the holes in Silicon is done by optical lithography and deep Silicon dry etching. In the experimental characterization, we have used slanted finger interdigitated transducers deposited on a thin layer of Zinc oxide (sputtered on top of the phononic crystal structure to excite elastic surface waves in Silicon) to cover a wide range of frequencies. We believe this to be the first reported demonstration of phononic band-gap for SAWs in a hexagonal lattice phononic crystal at such a high frequency.

Laser-Generated Surface Acoustic Wave Technique for Crack Monitoring – A Review

2013 ◽  
Vol 7 (2) ◽  
pp. 211-220 ◽  
Author(s):  
Kun Chen ◽  
◽  
Xing Fu ◽  
Dante J. Dorantes-Gonzalez ◽  
Yanning Li ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Numerical Models ◽  
Surface Acoustic Waves ◽  
Detection Methods ◽  
Quantitative Detection ◽  
Quantitative Monitoring ◽  
Crack Monitoring ◽  
Wave Technique

In this paper, the principle of surface acoustic wave techniques and their application to the monitoring of cracks are presented and compared to other classic non-destructive techniques. A practical classification of methods regarding the excitation and detection of surface acoustic waves is enumerated, among them, laser-generated surface acoustic wave technique is carefully analyzed as a prospective technique, and two important detection methods using piezoelectric and light deflection are described. Then, the strategies and variables used in crack monitoring based on laser-generated surface acoustic wave technique are reviewed. To achieve the goal of quantitative detection of cracks, most researchers use numerical models and experiments to characterize main crack features. Discussions and prospective approaches for further quantitative monitoring of cracks are provided.

X-ray diffraction from perfect silicon crystals distorted by surface acoustic waves

2000 ◽  
Vol 33 (4) ◽  
pp. 1019-1022 ◽  
Author(s):  
R. Tucoulou ◽  
R. Pascal ◽  
M. Brunel ◽  
O. Mathon ◽  
D. V. Roshchupkin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Crystal Surface ◽  
Source Region ◽  
Surface Acoustic Waves ◽  
X Ray Diffraction ◽  
Zno Film ◽  
Near Surface ◽  
X Ray

High-resolution X-ray diffraction measurements were carried out on ZnO/Si devices under surface acoustic wave excitation and revealed some very clear satellite diffraction peaks that are obtained from the sinusoidal modulation of the near-surface region. This experiment shows that the propagation of a Rayleigh surface acoustic wave in a perfect crystal acts as a dynamical diffraction grating. The variation of the acoustic velocity has been followed across the crystal surface from the acoustic source region (beneath the ZnO film) to the far field region (not covered by the ZnO film).

scholarly journals Optimizing the Design of Surface-Acoustic-Wave Ring Resonator by Changing the Interdigitated Transducer Topology

2021 ◽  
Vol 24 (6) ◽  
pp. 51-62
Author(s):  
S. Yu. Shevchenko ◽  
D. A. Mikhailenko ◽  
B. Nyamweru
Keyword(s):  
Acoustic Wave ◽  
Signal Detection ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Sensitive Element ◽  
Ring Resonator ◽  
Surface Acoustic Waves ◽  
Frequency Characteristics ◽  
Optimal Topology ◽  
Comsol Multiphysics

Introduction. Previous works considered the frequency characteristics and methods for fixing sensitive elements in the form of a wave ring resonator on surface acoustic waves in a housing made of various materials, as well as the influence of external factors on sensitive elements. It was found that the passband in such a case is sufficiently wide, which can affect adversely signal detection when measuring acceleration using the sensitive element under development. Therefore, it has become relevant to reduce the sensitive element’s bandwidth by changing the design of the interdigitated transducer (IDT).Aim. To demonstrate an optimal topology for an IDT with a low bandwidth, leading to improved signal detection when acceleration affects the sensitive element.Materials and methods. The finite element method and mathematical processing in AutoCAD and in COMSOL Multiphysics.Results. Nine topologies of IDT are proposed. All these types were investigated using the COMSOL Multiphysics software on lithium niobate substrates, which material acts as a sensitive element. The frequency characteristics are presented. The data obtained allowed an optimal design of the ring resonator to be proposed: an IDT with rectangular pins without selective withdrawal.Conclusion. Self-generation in a ring resonator can be performed by withdrawing no more than one pair of IDTs for 10 or more periods. In this case, the withdrawal of IDTs should be uniform. With an increase in the number of IDT withdrawals, the geometry of the ring resonator is violated, and the wave leaves the structure. The presence of a shared bus keeps the surface acoustic wave inside the IDT structure, and the narrowing of the periods towards the inner part of the structure makes it possible to improve the frequency characteristics of the ring resonator on surface acoustic waves.

scholarly journals Design and Optimization of a Novel SAW Gyroscope Structure Based on Amplitude Modulation with 1-D Phononic Crystals

Micromachines ◽  
2021 ◽  
Vol 12 (12) ◽  
pp. 1485
Author(s):  
Fei Ge ◽  
Liye Zhao ◽  
Yang Zhang
Keyword(s):  
Signal Processing ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Amplitude Modulation ◽  
Phononic Crystal ◽  
Defect Mode ◽  
High Sensitivity ◽  
Phononic Crystals ◽  
Linear Range ◽  
One Dimensional

Surface acoustic wave gyroscopes (SAWGs), as a kind of all-solid-state micro-electro-mechanical system (MEMS) gyroscopes, can work normally under extremely high-impact environmental conditions. Among the current SAWGs, amplitude-modulated gyroscopes (AMGs) are all based on the same gyro effect, which was proved weak, and their sensitivity and intensity of the output are both lower than frequency-modulated gyroscopes (FMGs). However, because FMGs need to process a series of frequency signals, their signal processing and circuits are far less straightforward and simple than AMGs. In order to own both high-sensitivity and simple signal processing, a novel surface acoustic traveling wave gyroscope based on amplitude modulation is proposed, using one-dimensional phononic crystals (PCs) in this paper. In view of its specific structure, the proposed gyroscope consists of a surface acoustic wave oscillator and a surface acoustic wave delay line within a one-dimensional phononic crystal with a high-Q defect mode. In this paper, the working principle is analyzed theoretically through the partial wave method (PWM), and the gyroscopes with different numbers of PCs are also designed and studied by using the finite element method (FEM) and multiphysics simulation. The research results demonstrate that under a 1 V oscillator voltage output, the higher sensitivity of −23.1 mV·(rad/s)−1 in the linear range from −8 rad/s to 8 rad/s is reached when the gyro with three PC walls, and the wider linear range from −15 rad/s to 17.5 rad/s with the sensitivity of −6.7 mV·(rad/s)−1 with only one PC wall. Compared with the existing AMGs using metal dots to enhance the gyro effect, the sensitivity of the proposed gyro is increased by 15 to 112 times, and the linear range is increased by 4.6 to 186 times, even without the enhancement of the metal dots.

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