Investigation of Packaging Effect of Silicon-Based Piezoresistive Pressure Sensor

2006 ◽  
Author(s):  
Chen-Hing Chu ◽  
Tsung-Lin Chou ◽  
Chun-Te Lin ◽  
Kuo-Ning Chiang
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
High Performance ◽  
Pressure Sensors ◽  
Design Parameters ◽  
Silicone Gel ◽  
Piezoresistive Pressure Sensor ◽  
Signal Sensitivity ◽  
Silicon Based ◽  
Packaging Effect

The silicon-based pressure sensor is one of the major applications in the MEMS device. Nowadays, the silicon piezoresistive pressure sensor is a mature technology in industry and its measurement accuracy is more rigorous in many advanced applications. In order to operate the piezoresistive pressure sensor in harsh environment, the silicone get is usually used to protect the die surface and wire bond while allowing the pressure signal to be transmitted to the silicon diaphragm. The major factor affecting the high performance applications of the piezoresistive pressure sensor is the temperature dependence of its pressure characteristics. Therefore, the thermal and packaging effects caused by the silicone gel behaviors should be taken into consideration to obtain better sensor accuracy and sensitivity. For this reason, a finite element method (FEM) is adopted for the sensor performance evaluation, and the thermal and pressure loading is applied on the sensor to study the output signal sensitivity as well as the packaging-induced signal variation, thermal/packaging effect reduction, and output signal prediction for the pressure sensors. The design parameters include silicon die size, silicone gel geometry and its material properties. The simulation results show that the smaller die size and the thicker die thickness can reduce the packaging-induced thermal effect. Furthermore, the different geometry of silicone gel also influences the sensitivity of pressure sensor.

scholarly journals Nano Carbon Black-Based High Performance Wearable Pressure Sensors

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 664 ◽  
Author(s):  
Junsong Hu ◽  
Junsheng Yu ◽  
Ying Li ◽  
Xiaoqing Liao ◽  
Xingwu Yan ◽  
...  
Keyword(s):  
Carbon Black ◽  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Atmospheric Pollutant ◽  
Piezoresistive Pressure Sensor ◽  
Nano Carbon

The reasonable design pattern of flexible pressure sensors with excellent performance and prominent features including high sensitivity and a relatively wide workable linear range has attracted significant attention owing to their potential application in the advanced wearable electronics and artificial intelligence fields. Herein, nano carbon black from kerosene soot, an atmospheric pollutant generated during the insufficient burning of hydrocarbon fuels, was utilized as the conductive material with a bottom interdigitated textile electrode screen printed using silver paste to construct a piezoresistive pressure sensor with prominent performance. Owing to the distinct loose porous structure, the lumpy surface roughness of the fabric electrodes, and the softness of polydimethylsiloxane, the piezoresistive pressure sensor exhibited superior detection performance, including high sensitivity (31.63 kPa−1 within the range of 0–2 kPa), a relatively large feasible range (0–15 kPa), a low detection limit (2.26 pa), and a rapid response time (15 ms). Thus, these sensors act as outstanding candidates for detecting the human physiological signal and large-scale limb movement, showing their broad range of application prospects in the advanced wearable electronics field.

Sensitivity analysis of packaging effect of silicon-based piezoresistive pressure sensor

2009 ◽  
Vol 152 (1) ◽  
pp. 29-38 ◽  
Author(s):  
Tsung-Lin Chou ◽  
Chen-Hung Chu ◽  
Chun-Te Lin ◽  
Kuo-Ning Chiang
Keyword(s):  
Sensitivity Analysis ◽  
Pressure Sensor ◽  
Piezoresistive Pressure Sensor ◽  
Silicon Based ◽  
Packaging Effect

Analysis and Validation of Sensing Sensitivity of a Piezoresistive Pressure Sensor

2003 ◽  
Author(s):  
Chun-Te Lin ◽  
Chih-Tang Peng ◽  
Ji-Cheng Lin ◽  
Kuo-Ning Chiang
Keyword(s):  
Pressure Sensor ◽  
Experimental Result ◽  
Design Parameters ◽  
Sensor Performance ◽  
Piezoresistive Pressure Sensor ◽  
Membrane Geometry ◽  
System Output ◽  
Silicon Based ◽  
Sensing Sensitivity ◽  
Selection Of

In this study, a packaged silicon based piezoresistive pressure sensor is designed, fabricated, and studied. A finite element method (FEM) is adopted for designing and optimizing the sensor performance. Thermal as well as pressure loading on the sensor is applied to make a comparison between experimental and simulation results. Furthermore, a method that transfers the simulation stress data into output voltage is proposed in this study, and the results indicate that the experimental result coincides with the simulation data. In order to achieve better sensor performance, a parametric analysis is performed to evaluate the system output sensitivity of the pressure sensor. The design parameters of the pressure sensor include membrane size/shape and the location of piezoresistor. The findings depict that proper selection of the membrane geometry and piezoresistor location can enhance the sensor sensitivity.

scholarly journals Ultrasensitive wearable pressure sensors based on Silver nanowire-coated fabrics

2020 ◽  
Author(s):  
Yunlu Lian ◽  
He Yu ◽  
Mingyuan Wang ◽  
Xiaonan Yang ◽  
Hefei Zhang
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Pressure Sensors ◽  
Fast Response ◽  
Silver Nanowire ◽  
Piezoresistive Pressure Sensor ◽  
Potential Applications ◽  
Care Systems ◽  
Coated Fabrics ◽  
Flexible Pressure Sensors

Abstract Flexible pressure sensors have attracted increasing attention due to their potential applications in wearable human health monitoring and care systems. Herein, we present a facile approach for fabricating all-textile-based piezoresistive pressure sensor with integrated Ag nanowire-coated fabrics. It fully takes advantage of the synergistic effect of the fiber/yarn/fabric multi-level contacts, leading to the ultrahigh sensitivity of 3.24×10 5 kPa −1 at 0–10 kPa and 2.16×10 4 kPa −1 at 10–100 kPa, respectively. Furthermore, the device achieved a fast response/relaxation time (32/24 ms), and a high stability (>1000 loading/unloading cycles). Thus, such all-textile pressure sensor with high performance is expected to be applicable in the fields of smart cloths, activity monitoring and healthcare device.

scholarly journals High performance tunable piezoresistive pressure sensor based on direct contact between printed graphene nanoplatelet composite layers

RSC Advances ◽  
2016 ◽  
Vol 6 (107) ◽  
pp. 105206-105210 ◽  
Author(s):  
Y. Mouhamad ◽  
T. Mortensen ◽  
A. Holder ◽  
A. R. Lewis ◽  
T. G. G. Maffeis ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Direct Contact ◽  
High Performance ◽  
Pressure Sensors ◽  
Graphene Nanoplatelets ◽  
Graphene Nanoplatelet ◽  
Large Force ◽  
Piezoresistive Pressure Sensor ◽  
Composite Layers ◽  
Force Range

Screen printed pressure sensors based on direct contact of graphene nanoplatelets composite layers, with no intermediate physical gap, showed an effective piezoresistive response over a large force range.

scholarly journals An Ultrahigh Sensitive Paper-Based Pressure Sensor with Intelligent Thermotherapy for Skin-Integrated Electronics

Nanomaterials ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 2536
Author(s):  
Lin Gao ◽  
Junsheng Yu ◽  
Ying Li ◽  
Peiwen Wang ◽  
Jun Shu ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Low Cost ◽  
Pressure Sensors ◽  
Fast Response ◽  
Integrated Electronics ◽  
Piezoresistive Pressure Sensor ◽  
Biomedical Diagnostics ◽  
Porous Microstructure ◽  
Ultrahigh Sensitivity

Porous microstructure pressure sensors that are highly sensitive, reliable, low-cost, and environment-friendly have aroused wide attention in intelligent biomedical diagnostics, human–machine interactions, and soft robots. Here, an all-tissue-based piezoresistive pressure sensor with ultrahigh sensitivity and reliability based on the bottom interdigitated tissue electrode and the top bridge of a microporous tissue/carbon nanotube composite was proposed. Such pressure sensors exhibited ultrahigh sensitivity (≈1911.4 kPa−1), fast response time (<5 ms), low fatigue of over 2000 loading/unloading cycles, and robust environmental degradability. These enabled sensors can not only monitor the critical physiological signals of the human body but also realize electrothermal conversion at a specific voltage, which enhances the possibility of creating wearable thermotherapy electronics for protecting against rheumatoid arthritis and cervical spondylosis. Furthermore, the sensor successfully transmitted wireless signals to smartphones via Bluetooth, indicating its potential as reliable skin-integrated electronics. This work provides a highly feasible strategy for promoting high-performance wearable thermotherapy electronics for the next-generation artificial skin.

scholarly journals Performance Investigation of Carbon Nanotube Based Temperature Compensated Piezoresistive Pressure Sensor

2021 ◽  
Author(s):  
REKHA DEVI ◽  
Sandeep Singh Gill
Keyword(s):  
Pressure Sensor ◽  
Temperature Compensation ◽  
Pressure Sensors ◽  
Negative Temperature ◽  
Device Fabrication ◽  
Sensor Performance ◽  
Piezoresistive Pressure Sensor ◽  
Higher Temperature ◽  
Increasing Temperature ◽  
Silicon Based

Abstract In silicon-based piezoresistive pressure sensor, the accuracy of the sensor is affected mainly by thermal drift and the sensitivity of the sensor varies with the rise in temperature. Here, the temperature effects on the desired representation of the sensor are analysed .Use of smart material Carbon nanotubes ( CNT) and a few effective temperature compensation techniques are presented in this study to reduce the temperature effect on the accuracy of the sensor. Resistive compensation employed extra piezoresistors with Negative Temperature Coefficient of Resistivity (TCR) for temperature compensation. The attainment of the desired compensation techniques is highly compatible with the MEMS device fabrication. The compensated pressure sensor is supremacy for pressure measurement with temperature variations. Though various techniques have been suggested and put into actuality with successful attainment, the techniques featuring easy implementation and perfect compatibility with existing schemes are still blooming demanded to design a piezoresistive pressure sensor with perfect comprehensive performance. In this paper, CNT piezoresistive material has been employed as sensing elements for pressure sensor and compared with silicon in terms of output voltage and sensor performance degradation at higher temperature. Pressure sensors using CNT and silicon piezo resistive sensing materials were simulated on silicon (100) diaphragm by ANYSIS. Based on simulation results, silicon and CNT both pressure sensor also shows better results at near room temperature. With the increasing temperature it is observed that silicon pressure output underestimated by 23%.

scholarly journals Ultrasensitive wearable pressure sensors based on Silver nanowire-coated fabrics

2020 ◽  
Author(s):  
Yunlu Lian ◽  
He Yu ◽  
Mingyuan Wang ◽  
Xiaonan Yang ◽  
Hefei Zhang
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Pressure Sensors ◽  
Fast Response ◽  
Silver Nanowire ◽  
Piezoresistive Pressure Sensor ◽  
Potential Applications ◽  
Care Systems ◽  
Coated Fabrics ◽  
Flexible Pressure Sensors

Abstract Flexible pressure sensors have attracted increasing attention due to their potential applications in wearable human health monitoring and care systems. Herein, we present a facile approach for fabricating all-textile-based piezoresistive pressure sensor with integrated Ag nanowire-coated fabrics. It fully takes advantage of the synergistic effect of the fiber/yarn/fabric multi-level contacts, leading to the ultrahigh sensitivity of 3.24×10 5 kPa −1 at 0–10 kPa and 2.16×10 4 kPa −1 at 10–100 kPa, respectively. Furthermore, the device achieved a fast response/relaxation time (32/24 ms), and a high stability (>1000 loading/unloading cycles). Thus, such all-textile pressure sensor with high performance is expected to be applicable in the fields of smart cloths, activity monitoring and healthcare device.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

2013 ◽  
Vol 313-314 ◽  
pp. 666-670 ◽  
Author(s):  
K.J. Suja ◽  
Bhanu Pratap Chaudhary ◽  
Rama Komaragiri
Keyword(s):  
Pressure Sensor ◽  
Integrated Circuit ◽  
Output Voltage ◽  
Pressure Sensors ◽  
Micro Electro Mechanical System ◽  
Constant Thickness ◽  
Piezoresistive Pressure Sensor ◽  
Wide Pressure Range ◽  
Processing Techniques ◽  
Wide Pressure

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

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