New Fabrication Method for High-Q MEMS Inductors

2012 ◽  
Author(s):  
Wen-Cheng Kuo ◽  
Chao-Yang Hsu ◽  
Yao-Joe Yang
Keyword(s):  
Data Transmission ◽  
Picosecond Laser ◽  
Substrate Material ◽  
Q Factor ◽  
Fabrication Method ◽  
Test Device ◽  
Parylene C ◽  
High Q ◽  
Metal Thickness

This study presents a novel fabrication method to enhance the quality of flexible MEMS inductors for wireless energy and data transmission applications. The fabrication process used parylene C as a polymeric substrate material with a thickness of 50 μm and patterned by a picosecond laser. We modeled the test device in a simulation and then verified its feasibility through experimentation. We computed the projected Q-factor enhancement to be approximately 8.9x the 2 μm metal thickness of traditional evaporation methods at a 1 MHz operation frequency. The thickness of the metal, integrated with picosecond laser-cutting technology, resulted in an enhanced Q-factor compared to traditional multilayer or fold-and-bond methods. The production process was simple and did not require a bonding process. The research indicated that such Q-enhanced MEMS inductors could be integrated with biomedical implants for wireless energy and data transmission applications.

Dual-Band BSF with Enhanced Quality Factor

2021 ◽  
Vol 36 (1) ◽  
pp. 89-98
Author(s):  
Asmaa Farahat ◽  
Khalid Hussein
Keyword(s):  
Impedance Matching ◽  
Dielectric Substrate ◽  
Substrate Material ◽  
Dual Band ◽  
Finite Width ◽  
Q Factor ◽  
High Q ◽  
Final Design ◽  
The Difference ◽  
Good Agreement

In the present work, a U-shaped CPW resonator (CPWR) with, generally, unequal arms is proposed to produce high Q-factor bandstop filter (BSF) based on broadside-coupling between the CPWR and a CPW through-line (CPWTL), which are printed on opposite faces of a thin substrate. The unequal arms of the U-shape and the finite width of the ground strips of the CPWR are shown to produce much higher Q-factor than that of equal arms and infinitely extending side ground planes. The dimensions of the CPWTL are optimized for impedance matching while the dimensions of the CPWR are optimized to obtain the highest Q-factor. The effect of the loss tangent of the dielectric substrate material on the Q-factor is investigated. It is shown that the difference between the lengths of the unequal arms of the U-shaped resonator can be used to control the Q-factor. Thanks to the computational efficiency of the employed electromagnetic simulator, enough number of trials has been successfully performed in reasonable time to arrive at the final design of the BSF. A prototype of the proposed BSF is fabricated for experimental investigation of its performance. The experimental measurements show good agreement when compared with the corresponding simulation results.

Lithography below 100 nm

1983 ◽  
Vol 41 ◽  
pp. 96-99
Author(s):  
L. D. Jackel
Keyword(s):  
Spatial Distribution ◽  
Electron Beam ◽  
Electron Scattering ◽  
Electron Beam Lithography ◽  
Substrate Material ◽  
Local Electron ◽  
Electron Dose ◽  
Positive Resist ◽  
Exposure Process

Most production electron beam lithography systems can pattern minimum features a few tenths of a micron across. Linewidth in these systems is usually limited by the quality of the exposing beam and by electron scattering in the resist and substrate. By using a smaller spot along with exposure techniques that minimize scattering and its effects, laboratory e-beam lithography systems can now make features hundredths of a micron wide on standard substrate material. This talk will outline sane of these high- resolution e-beam lithography techniques.We first consider parameters of the exposure process that limit resolution in organic resists. For concreteness suppose that we have a “positive” resist in which exposing electrons break bonds in the resist molecules thus increasing the exposed resist's solubility in a developer. Ihe attainable resolution is obviously limited by the overall width of the exposing beam, but the spatial distribution of the beam intensity, the beam “profile” , also contributes to the resolution. Depending on the local electron dose, more or less resist bonds are broken resulting in slower or faster dissolution in the developer.

scholarly journals High-Q-Factor Tunable Silica-Based Microring Resonators

Photonics ◽  
2021 ◽  
Vol 8 (7) ◽  
pp. 256
Author(s):  
Yue-Xin Yin ◽  
Xiao-Pei Zhang ◽  
Xiao-Jie Yin ◽  
Yue Li ◽  
Xin-Ru Xu ◽  
...  
Keyword(s):  
Optical Communications ◽  
Microring Resonator ◽  
Microring Resonators ◽  
Q Factor ◽  
Notch Depth ◽  
Critical Coupling ◽  
Practical Application ◽  
Coupling Condition ◽  
High Q ◽  
Racetrack Resonator

A high-Q-factor tunable silica-based microring resonator (MRR) is demonstrated. To meet the critical-coupling condition, a Mach–Zehnder interferometer (MZI) as the tunable coupler was integrated with a racetrack resonator. Then, 40 mW electronic power was applied on the microheater on the arm of MZI, and a maximal notch depth of about 13.84 dB and a loaded Q factor of 4.47 × 106 were obtained. The proposed MRR shows great potential in practical application for optical communications and integrated optics.

Dielectric-loaded L-band filters for high-power space applications

2021 ◽  
pp. 1-11
Author(s):  
Paolo Vallerotonda ◽  
Fabrizio Cacciamani ◽  
Luca Pelliccia ◽  
Alessandro Cazzorla ◽  
Davide Tiradossi ◽  
...  
Keyword(s):  
High Power ◽  
Dielectric Resonators ◽  
Q Factor ◽  
Rf Power ◽  
Space Applications ◽  
High Q ◽  
Critical Issues ◽  
L Band ◽  
Multipactor Discharge ◽  
Filter Response

Abstract The design and first experimental results of Tx and Rx L-band bandpass filters for a high-power satellite diplexer are presented in this paper. Designed in the framework of an ESA ARTES AT project, the filters are based on TM010 mode dielectric resonators. These resonators allow for better results in terms of volume occupation with respect to other dielectric resonators still maintaining high Q-factor values (>2000). Volume saving above 30% is achieved with respect to standard coaxial filters. The filter geometries and materials have been chosen in order to improve the power-handling and to cope with related critical issues for space applications (i.e. avoid any multipactor discharge in the operating RF power range and low-PIM response). Measurements of Tx filter show good correlation with the design in terms of central frequency, BW, and unloaded Q-factor (almost 3000). Measurements of Rx filter show a worse correlation with the design in terms of filter response shape. This is ascribed to size tolerances of one of the filter resonators. Multiple analyses are ongoing to remove this degradation in the final engineering model.

High sensitivity and high Q-factor nanoslotted parallel quadrabeam photonic crystal cavity for real-time and label-free sensing

2014 ◽  
Vol 105 (6) ◽  
pp. 063118 ◽  
Author(s):  
Daquan Yang ◽  
Shota Kita ◽  
Feng Liang ◽  
Cheng Wang ◽  
Huiping Tian ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Real Time ◽  
High Sensitivity ◽  
Q Factor ◽  
Label Free ◽  
Photonic Crystal Cavity ◽  
High Q

Benefits of the LTCC Substrate Configuration with an Air-Gap for Realization of RF Inductor with High Q-Factor and SRF

2012 ◽  
Vol 9 (1) ◽  
pp. 1-10 ◽  
Author(s):  
Goran J. Radosavljević ◽  
Andrea M. Marić ◽  
Walter Smetana ◽  
Ljiljana D. Živanov
Keyword(s):  
Air Gap ◽  
Q Factor ◽  
High Q ◽  
Rf Inductor ◽  
Ltcc Substrate

On the Field Evaporation Behavior of a Model Ni-Al-Cr Superalloy Studied by Picosecond Pulsed-Laser Atom-Probe Tomography

2008 ◽  
Vol 14 (6) ◽  
pp. 571-580 ◽  
Author(s):  
Yang Zhou ◽  
Christopher Booth-Morrison ◽  
David N. Seidman
Keyword(s):  
Atom Probe Tomography ◽  
Mass Spectra ◽  
Pulsed Laser ◽  
Picosecond Laser ◽  
Atom Probe ◽  
Resolving Power ◽  
Noise Levels ◽  
Thermally Activated ◽  
Mass Resolving Power

AbstractThe effects of varying the pulse energy of a picosecond laser used in the pulsed-laser atom-probe (PLAP) tomography of an as-quenched Ni-6.5 Al-9.5 Cr at.% alloy are assessed based on the quality of the mass spectra and the compositional accuracy of the technique. Compared to pulsed-voltage atom-probe tomography, PLAP tomography improves mass resolving power, decreases noise levels, and improves compositional accuracy. Experimental evidence suggests that Ni2+, Al2+, and Cr2+ ions are formed primarily by a thermally activated evaporation process, and not by post-ionization of the ions in the 1+ charge state. An analysis of the detected noise levels reveals that for properly chosen instrument parameters, there is no significant steady-state heating of the Ni-6.5 Al-9.5 Cr at.% tips during PLAP tomography.

scholarly journals High Q-factor with the excitation of anapole modes in dielectric split nanodisk arrays

2017 ◽  
Vol 25 (19) ◽  
pp. 22375 ◽  
Author(s):  
Shao-Ding Liu ◽  
Zhi-Xing Wang ◽  
Wen-Jie Wang ◽  
Jing-Dong Chen ◽  
Zhi-Hui Chen
Keyword(s):  
Q Factor ◽  
High Q
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