Nonlinear Forced Vibration of a Beam-Type Resonator With Attached Eccentric Mass
In this paper, the nonlinear model of an asymmetric micro-bridge resonator with an attached eccentric mass is investigated. The resonator is treated using the Euler-Bernoulli beam theory. The attached mass represents the electrostatic comb-drive actuator in micro-electromechanical applications. The center of mass of the actuator is assumed to be off the neutral axis of the beam. The governing equations of motion are derived assuming that a concentrated harmonic force is applied to the attached mass. The nonlinear forced vibration of the system is studied using the method of multiple scales. It has been demonstrated that the eccentricity of the mass may lead to different types of nonlinear resonance, e.g., superharmonic and internal resonance. The end application of the structure under investigation is in resonant sensing and energy harvesting applications.