Precision Coating of ta-C Films on Quartz Surfaces

2020 ◽  
Author(s):  
Kotaro Kawai ◽  
Yuki Hirata ◽  
Hiroki Akasaka ◽  
Naoto Ohtake
Keyword(s):  
Cutting Tools ◽  
Three Dimensional ◽  
High Hardness ◽  
Carbon Films ◽  
Vacuum Arc ◽  
High Wear Resistance ◽  
Chemical Inertness ◽  
Filtered Cathodic Vacuum Arc ◽  
Surface Morphologies

Abstract Diamond-like carbon (DLC) films have excellent properties such as high hardness, low friction coefficient, high wear resistance, chemical inertness and so on. Because DLC film is considered as an effective coating material to improve their surface properties, this films are used in various applications such as parts for automobiles engines, hard disk surfaces, cutting tools and dies, and so on. DLC films consist of a mixture of sp2 bonded carbon atoms and sp3 bonded carbon atoms. Among them, ta-C film is known as the hardest and strongest film since it mainly consists of sp3 bonded carbon atoms. One of deposition methods to form ta-C is Filtered Cathodic Vacuum Arc (FCVA). The characteristic of this method is that it is possible to remove the droplets and form a high-quality film.. However, even though lots of mechanical components which require ta-C coating have three-dimensionally shapes, it is difficult to coat ta-C film three dimensionally by using FCVA process. At present, researches on 3D deposition of amorphous carbon films on three dimensional components is still insufficient, and investigation reports on the deposition mechanism and characterization of the deposited films are even more limited. In this study, we tried to deposit films on 3D components by the FCVA method and evaluated the microstructure and surface morphologies of films. Although films were coated successfully in the entire surfaces, different properties were showed depending on the location of components. These properties were investigated by Raman spectroscopy and laser microscope.

Characterization of Boron- and Phosphorous-Incorporated Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Vacuum Arc Process

2009 ◽  
Vol 48 (6) ◽  
pp. 065501 ◽  
Author(s):  
Omvir Singh Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
Sonnada Math Shivaprasad ◽  
Bukinakere Subbakrihniah Satyanarayana ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Filtered Cathodic Vacuum Arc

Characterization of Thick Amorphous Carbon Films Formed by Pulse Bias Filtered Cathodic Vacuum Arc

2006 ◽  
Vol 45 (10A) ◽  
pp. 7854-7859 ◽  
Author(s):  
Nobuto Yasui ◽  
Hiroshi Inaba ◽  
Hiromu Chiba ◽  
Xudong Yang ◽  
Shu Ping Lau
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Filtered Cathodic Vacuum Arc

Progress on Research of Machining of Difficult-to-Machine Materials Using CBN Cutting Tools

2015 ◽  
Vol 723 ◽  
pp. 910-913
Author(s):  
Shi Long Gao ◽  
Li Bao An ◽  
Xiao Chong Wang ◽  
Song Gao
Keyword(s):  
Metal Cutting ◽  
Cutting Tool ◽  
Cubic Boron Nitride ◽  
Cutting Tools ◽  
High Hardness ◽  
High Wear Resistance ◽  
High Chemical ◽  
Tool Materials ◽  
Chemical Inertness ◽  
Cutting Tool Materials

Some engineering materials have excellent performances, but the machining of these materials is a problem. It is very inadequate to meet machining requirement only using traditional cutting tool materials. Therefore, exploring the machinability of difficult-to-machine materials and applying appropriate cutting tool materials have drawn much attention in metal cutting industry for guarantied product quality and productivity. Cubic boron nitride (CBN) has been recognized as one of the most suitable cutting tool materials due to its high hardness, high wear resistance, high chemical inertness, and excellent chemical stability in high temperature. Research on various aspects of CBN cutting performances has been conducted in recent years. This paper presents the progress on machining difficult-to-machine materials using CBN cutting tools.

Electrochemical Characterization of Nitrogen-Incorporated Tetrahedral Carbon Films Grown by a Filtered Cathodic Vacuum Arc

2001 ◽  
Vol 4 (10) ◽  
pp. E42 ◽  
Author(s):  
Nelson C. Yee ◽  
Qingfang Shi ◽  
Wen-Bin Cai ◽  
Daniel A. Scherson ◽  
Barry Miller
Keyword(s):  
Carbon Films ◽  
Electrochemical Characterization ◽  
Vacuum Arc ◽  
Filtered Cathodic Vacuum Arc

scholarly journals Thermal stability and diffusion characteristics of ultrathin amorphous carbon films grown on crystalline and nitrogenated silicon substrates by filtered cathodic vacuum arc deposition

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Shengxi Wang ◽  
Anurag Roy ◽  
Kyriakos Komvopoulos
Keyword(s):  
Thermal Stability ◽  
Amorphous Carbon ◽  
Silicon Substrate ◽  
Elevated Temperatures ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Cross Sectional ◽  
Prolonged Heating ◽  
Filtered Cathodic Vacuum Arc ◽  
Thermal Stability Of

AbstractAmorphous carbon (a-C) films are widely used as protective overcoats in many technology sectors, principally due to their excellent thermophysical properties and chemical inertness. The growth and thermal stability of sub-5-nm-thick a-C films synthesized by filtered cathodic vacuum arc on pure (crystalline) and nitrogenated (amorphous) silicon substrate surfaces were investigated in this study. Samples of a-C/Si and a-C/SiNx/Si stacks were thermally annealed for various durations and subsequently characterized by high-resolution transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS). The TEM images confirmed the continuity and uniformity of the a-C films and the 5-nm-thick SiNx underlayer formed by silicon nitrogenation using radio-frequency sputtering. The EELS analysis of cross-sectional samples revealed the thermal stability of the a-C films and the efficacy of the SiNx underlayer to prevent carbon migration into the silicon substrate, even after prolonged heating. The obtained results provide insight into the important attributes of an underlayer in heated multilayered media for preventing elemental intermixing with the substrate, while preserving the structural stability of the a-C film at the stack surface. An important contribution of this investigation is the establishment of an experimental framework for accurately assessing the thermal stability and elemental diffusion in layered microstructures exposed to elevated temperatures.

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

2002 ◽  
Vol 195 (1-4) ◽  
pp. 107-116 ◽  
Author(s):  
L.J Yu ◽  
D Sheeja ◽  
B.K Tay ◽  
Daniel H.C Chua ◽  
W.I Milne ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Filtered Cathodic Vacuum Arc

FCVA-Synthesized Tetrahedral Amorphous Carbon Films for Biomedical Applications

2007 ◽  
Vol 336-338 ◽  
pp. 1577-1580 ◽  
Author(s):  
Chuan Lin Zheng ◽  
Wu Bao Yang ◽  
X. Chang
Keyword(s):  
Amorphous Carbon ◽  
Biomedical Applications ◽  
Pure Titanium ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Negative Bias Voltage ◽  
Tetrahedral Amorphous Carbon ◽  
In Vitro Measurements ◽  
Filtered Cathodic Vacuum Arc

Tetrahedral amorphous carbon (ta-C) films were deposited onto Si(100) wafers by using filtered cathodic vacuum arc technique (FCVA). The influence of the negative bias voltage applied to substrates on film structures was studied by Raman spectroscopy, X-ray photoemission spectroscopy (XPS). The ta-C films showed maximal sp3 fractions 87%, the hardness and elastic modulus of the ta-C film is 72 and 480 GPa, respectively. In vitro measurements of contact angle and platelet adhesion were applied to evaluate the biocompatibility of the ta-C films in comparison with that of NiTi, 316L and pure titanium. The results show that the ta-C films have hydrophobicity and exhibit better hemocompatibility which are very suitable for biomedical applications.

A Study on Mechanical and Tribological Properties of Hot Pressed Al2O3/ZrO2/h-BN/TiO2 Composites

2011 ◽  
Vol 695 ◽  
pp. 417-420 ◽  
Author(s):  
Hyun Hwi Lee ◽  
Seung Ho Kim ◽  
Bhupendra Joshi ◽  
Soo Wohn Lee
Keyword(s):  
Tribological Properties ◽  
Ceramic Composite ◽  
Elevated Temperatures ◽  
Cutting Tools ◽  
High Hardness ◽  
High Melting Point ◽  
Corrosion Resistant ◽  
Mechanical And Tribological Properties ◽  
Chemical Inertness ◽  
Corrosion Resistant Coatings

Oxide ceramics such as alumina and zirconia are industrially utilized as cutting tools, a variety of bearings, biomaterials, and thermal and corrosion-resistant coatings due to their high hardness, chemical inertness, high melting point, and ability to retain mechanical strength at elevated temperatures. In this research, the effect of other ceramic additives (TiO2) and h-BN within alumina(α-Al2O3) and yttria-stabilized tetragonal (Y-TZP) composite was studied with respect to the mechanical and tribological properties. The lowest coefficient of frction of 0.45 was observed for the ZTA ceramic composite with hBN-TiO2. The highest hardness, fracture toughness and flexural strength were obtained as 15.7GPa, 5.2MPam-1/2, 712MPa, respectively.

Sign in / Sign up

Export Citation Format

Share Document