Properties of Ti-Si-N Nanocomposite Coatings Deposited by Closed-Field Unbalanced Magnetron Sputtering

2005 ◽  
Author(s):  
C. H. Zhang ◽  
X. C. Lu ◽  
J. B. Luo ◽  
Y. G. Shen ◽  
K. Y. Li
Keyword(s):  
Magnetron Sputtering ◽  
Analytical Techniques ◽  
Closed Field ◽  
Maximum Hardness ◽  
Tin Coating ◽  
Wear Performance ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Si Content ◽  
Amorphous Si3n4

Ti-Si-N coatings with different silicon contents were deposited by reactive magnetron sputtering. These coatings were characterized and analyzed by using a variety of analytical techniques. The Ti-Si-N coating shows a denser structure as compared with TiN coating, and consists of TiN crystallites and amorphous Si3N4 phase. The maximum hardness and Young’s Modulus of 52 GPa and 360 GPa respectively are achieved as the Si content was 8.6 at.%. The Ti-Si-N coating with 8.6 at.% Si shows the excellent oxidation resistance behavior and perfect anti-wear performance.

Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 190-193
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Grain Shape ◽  
Effect Of Temperature ◽  
Closed Field ◽  
Columnar Crystal ◽  
Crn Coating ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crn Coatings

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (TS) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

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