Variations of a Ni-P Surface Layer After Nanoparticle Impacts
Keyword(s):
In CMP, erosive wear regarded as one of the wear mechanisms underlying the interaction between the abrasive particles and polished surfaces can occur when materials are removed from surface collision of particles which are carried by a fluid medium. In this paper, the microscopic examination of the NiP coatings after nanoparticle impacts is performed. The experimental results indicate that craters and scratches can be observed in the surface after nanoparticle impacts, and crystal grains in nano-scale and element phosphorus concentration can be found in the sub-surface layer of the impacted surface.
2015 ◽
Vol 732
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pp. 389-392
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1966 ◽
Vol 291
(1427)
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pp. 520-536
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2015 ◽
Vol 642
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pp. 202-206
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2017 ◽
Vol 7
(2)
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pp. 631
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2012 ◽
Vol 217-219
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pp. 221-225
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