Control of MEMS Nanopositioners With Nano-Scale Resolution

2006 ◽  
Author(s):  
Jason J. Gorman ◽  
Yong-Sik Kim ◽  
Nicholas G. Dagalakis
Keyword(s):  
Data Storage ◽  
Scanning Probe Microscopy ◽  
Dynamic Models ◽  
Beam Steering ◽  
Open Loop ◽  
Experimental Results ◽  
Scanning Probe ◽  
Flexure Mechanism ◽  
Nano Scale ◽  
Ultra Precision

Several approaches for the precision control of micro-scale positioning mechanisms, or MEMS nanopositioners, are presented along with initial experimental results which demonstrate nano-scale positioning resolution. The MEMS nanopositioners discussed in this paper are novel precision mechanisms comprised of a bent-beam thermal actuator and a flexure mechanism for each degree of freedom (DOF). These mechanisms can be used for a host of ultra-precision positioning applications, including nanomanipulation, scanning probe microscopy, high-density data storage and beam steering arrays. Concentrating on a 1 DOF MEMS nanopositioner, empirical static and dynamic models have been derived using characterization data obtained from experiments with optical and laser probe microscopes. Based on these models, three control approaches have been developed: 1) a quasi-static nonlinear open-loop controller, 2) a nonlinear forward compensator, and 3) a nonlinear PI controller. Simulation and initial experimental results are presented, and the benefits of each of these approaches are discussed.

Basic Study on High-density Ferroelectric Data Storage Using Scanning Nonlinear Dielectric Microscopy

2002 ◽  
Vol 748 ◽  
Author(s):  
Yoshiomi Hiranaga ◽  
Kenjiro Fujimoto ◽  
Yasuo Wagatsuma ◽  
Yasuo Cho ◽  
Atsushi Onoe ◽  
...  
Keyword(s):  
Data Storage ◽  
Scanning Probe Microscopy ◽  
High Density ◽  
Scanning Probe ◽  
Ferroelectric Polarization ◽  
Domain Formation ◽  
Basic Study ◽  
Polarization Distribution ◽  
Nonlinear Dielectric ◽  
Probe Microscopy

ABSTRACTScanning Nonlinear Dielectric Microscopy (SNDM) is the method for observing ferroelectric polarization distribution, and now, its resolution has become to the sub-nanometer order, which is much higher than other scanning probe microscopy (SPM) methods for the same purpose. Up to now, we have studied high-density ferroelectric data storage using this microscopy. In this study, we have conducted fundamental experiments of nano-sized inverted domain formation in LiTaO3 single, and successfully formed inverted dot array with the density of 1.5 Tbit/inch2.

Large Deflection 3DOF Piezoelectric Microrobotic Manipulator With Positional Sensing and Self-Calibration

2012 ◽  
Author(s):  
Xing Jin ◽  
Jason V. Clark
Keyword(s):  
Dynamic Response ◽  
Frequency Response ◽  
Range Of Motion ◽  
Data Storage ◽  
Scanning Probe Microscopy ◽  
Large Deflection ◽  
Scanning Probe ◽  
Large Deflections ◽  
Self Calibration ◽  
Aqueous Environments

In this paper, we propose a large deflection piezoelectric microrobotic manipulator with the ability to self-calibrate displacement and sense its position. Such a manipulator should be applicable to scanning probe microscopy, nanolithography, data storage, biological probing in murky aqueous environments, and the like. Previous devices for such applications are limited in dexterity, range of motion, frequency response, positional calibration, or require environmental cleanliness. Our device has a three novel attributes, which are: an ability to achieve large deflections with greater than one degree of freedom (DOF); an ability to self-calibrate it displacement; and an ability to sense its position after actuation or prescribed displacement. Through simulation we demonstrate independent 3 DOF motional control (validated experimentally), positional sensing and self-calibration, and dynamic response.

Nano-scale Characterization of Surface Defects on CMP-finished Si Wafers by Scanning Probe Microscopy Combined with Laser Light Scattering

2007 ◽  
Vol 991 ◽  
Author(s):  
Kenta Arima ◽  
Takushi Shigetoshi ◽  
Haruyuki Inoue ◽  
Tsukasa Kawashima ◽  
Takaaki Hirokane ◽  
...  
Keyword(s):  
Light Scattering ◽  
Scanning Probe Microscopy ◽  
Surface Defects ◽  
Laser Light ◽  
Theoretical Calculations ◽  
Scattered Light ◽  
Laser Light Scattering ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Nano Scale

ABSTRACTScanning probe microscopy has been widely used to evaluate surface microroughness on Si wafers after chemical mechanical polishing (CMP) processes. In this article, we utilize atomic force microscopy (AFM) combined with laser light scattering to detect nano-scale surface defects called microscratches on CMP-finished Si wafers. We find that most microscratches detected by the combined method are very shallow trenches with widths and depths of 80–200 nm and 0.1–0.2 nm, respectively. The dependence of scattered-light intensity on the size of microscratches agrees with theoretical calculations within one order of magnitude.

scholarly journals Scanning probe microscopy cantilevers improvement for advanced research and manipulation at nano scale.

2020 ◽  
Vol 1461 ◽  
pp. 012190
Author(s):  
S Yu Krasnoborodko ◽  
Yu E Vysokikh ◽  
M F Bulatov ◽  
D V Churikov ◽  
V I Shevyakov
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Nano Scale

Nano-scale lithography using scanning probe microscopy

1999 ◽  
pp. 261-264
Author(s):  
Masayoshi Ishibashi ◽  
Seiji Heike ◽  
Nami Sugita ◽  
Hiroshi Kajiyama ◽  
Yasuo Wada ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Nano Scale

scholarly journals Molecular Magnetic Materials on Solid Surfaces

2009 ◽  
Author(s):  
Matteo Mannini
Keyword(s):  
Data Storage ◽  
Single Molecule ◽  
Scanning Probe Microscopy ◽  
Organic Radicals ◽  
Solid Surfaces ◽  
Scanning Probe ◽  
Metallic Surfaces ◽  
Single Molecule Magnets ◽  
Tailored Approach ◽  
Phd Thesis

This PhD thesis summarises a study of the nanostructuration of single molecule magnets and organic radicals on metallic surfaces, carried out by the author in collaboration with a number of research groups in Italy, France, Germany and Israel. A tailored approach was followed to graft individual molecules to the surface, to characterise the morphology of the functionalised surfaces with standard scanning probe microscopy and to investigate their magnetic properties using X-Ray circular dichroism. The aim of this project was to develop the initial basis for the organisation and addressing of magnetic molecules with a view to the development of single molecule devices for data storage and molecular-spintronic applications.

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