Comparison of in situ and ex situ plasma-treated metalorganic chemical vapor deposition titanium nitride thin films
2002 ◽
Vol 20
(6)
◽
pp. 2219
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1991 ◽
Vol 107
(1-4)
◽
pp. 699-704
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1999 ◽
Vol 38
(Part 2, No. 6A/B)
◽
pp. L632-L635
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1993 ◽
Vol 11
(4)
◽
pp. 1431-1434
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