Topography simulations for contact formation involving reactive ion etching, sputtering and chemical vapor deposition
2005 ◽
Vol 23
(3)
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pp. 1076
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Keyword(s):
1993 ◽
Vol 5
(3)
◽
pp. 279-281
◽
1990 ◽
Vol 8
(3)
◽
pp. 1702-1705
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Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1995 ◽
Vol 13
(4)
◽
pp. 1447
◽
Keyword(s):
Keyword(s):
1993 ◽
Vol 140
(2)
◽
pp. 513-518
◽