Proximity effect correction using blur map in electron projection lithography

2005 ◽  
Vol 23 (6) ◽  
pp. 3188 ◽  
Author(s):  
Hiroshi Yamashita ◽  
Jiro Yamamoto ◽  
Fumihiro Koba ◽  
Hiroshi Arimoto
Keyword(s):  
Proximity Effect ◽  
Projection Lithography ◽  
Proximity Effect Correction ◽  
Blur Map

High-Speed Proximity Effect Correction System for Electron-Beam Projection Lithography by Cluster Processing

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3827-3832 ◽  
Author(s):  
Kozo Ogino ◽  
Hiromi Hoshino ◽  
Yasuhide Machida ◽  
Morimi Osawa ◽  
Hiroshi Arimoto ◽  
...  
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
High Speed ◽  
Projection Lithography ◽  
Beam Projection ◽  
Proximity Effect Correction ◽  
Correction System

Evaluation of Performance of Proximity Effect Correction in Electron Projection Lithography

2005 ◽  
Vol 44 (7B) ◽  
pp. 5535-5539
Author(s):  
Morimi Osawa ◽  
Kozo Ogino ◽  
Hiromi Hoshino ◽  
Yasuhide Machida ◽  
Fumihiro Koba ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Evaluation Of Performance ◽  
Projection Lithography ◽  
Proximity Effect Correction

Investigation of proximity effect correction in electron projection lithography (EPL)

2000 ◽  
Author(s):  
Teruaki Okino ◽  
Kazuaki Suzuki ◽  
Kazuya Okamoto ◽  
Shintaro Kawata ◽  
Kiyoshi Uchikawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Projection Lithography ◽  
Proximity Effect Correction

Highly Accurate Proximity Effect Correction for 100 kV Electron Projection Lithography

2005 ◽  
Vol 44 (7B) ◽  
pp. 5590-5594 ◽  
Author(s):  
Fumihiro Koba ◽  
Hiroshi Yamashita ◽  
Hiroshi Arimoto
Keyword(s):  
Proximity Effect ◽  
Projection Lithography ◽  
Proximity Effect Correction
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