Evaluation of Performance of Proximity Effect Correction in Electron Projection Lithography
2003 ◽
Vol 42
(Part 1, No. 6B)
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pp. 3827-3832
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Keyword(s):
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2005 ◽
Vol 23
(6)
◽
pp. 3188
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Keyword(s):
2005 ◽
Vol 44
(7B)
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pp. 5590-5594
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2001 ◽
Vol 19
(6)
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pp. 2483
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