Nitrogen incorporation in sputter deposited molybdenum nitride thin films
2016 ◽
Vol 34
(2)
◽
pp. 021513
◽
2003 ◽
Vol 83
(2)
◽
pp. 125-133
◽
1996 ◽
Vol 54
◽
pp. 1000-1001
Keyword(s):
1996 ◽
Vol 54
◽
pp. 1020-1021
1995 ◽
Vol 05
(C8)
◽
pp. C8-689-C8-694
◽
1995 ◽
Vol 05
(C8)
◽
pp. C8-683-C8-688
◽
Keyword(s):
Keyword(s):