Inductively coupled plasma etching of bulk, single-crystal Ga2O3
2017 ◽
Vol 35
(3)
◽
pp. 031205
◽
Jiancheng Yang
◽
Shihyun Ahn
◽
Fan Ren
◽
Stephen Pearton
◽
Rohit Khanna
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...
2014 ◽
Vol 25
(1)
◽
pp. 015016
◽
P-C Chen
◽
P-T Lin
◽
D G Mikolas
◽
Y-W Tsai
◽
Y-L Wang
◽
...
2019 ◽
Vol 39
(9)
◽
pp. 2831-2838
◽
Yi Zhang
◽
Rulin Li
◽
Yongjie Zhang
◽
Dianzi Liu
◽
Hui Deng
Z. Ren
◽
S. Yu
◽
J. M. Marshall
◽
D. Walker
◽
P. A. Thomas
2005 ◽
Vol 23
(5)
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pp. 2236
◽
Jean Nguyen
◽
John Gill
◽
Sir B. Rafol
◽
Alexander Soibel
◽
Arezou Khoshakhlagh
◽
...
2005 ◽
Vol 34
(6)
◽
pp. 740-745
◽
E. Laffosse
◽
J. Baylet
◽
J. P. Chamonal
◽
G. Destefanis
◽
G. Cartry
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...
2012 ◽
Vol 520
(18)
◽
pp. 5946-5951
◽
Xiaoqiang Sun
◽
Xiaodong Li
◽
Changming Chen
◽
Kun Zhang
◽
Jie Meng
◽
...
2011 ◽
Vol 519
(11)
◽
pp. 3686-3689
◽
A. Baharin
◽
R.S. Pinto
◽
U.K. Mishra
◽
B.D. Nener
◽
G. Parish
2009 ◽
Vol 517
(14)
◽
pp. 3859-3861
◽
Byung-Jae Kim
◽
Hyunjung Jung
◽
Hong-Yeol Kim
◽
Joona Bang
◽
Jihyun Kim