Fabrication of waveguides by inductively coupled plasma etching on LiNbO 3 /LiTaO 3 single crystal film by liquid phase epitaxy growth
2014 ◽
Vol 25
(1)
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pp. 015016
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2019 ◽
Vol 39
(9)
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pp. 2831-2838
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2017 ◽
Vol 35
(3)
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pp. 031205
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2005 ◽
Vol 23
(5)
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pp. 2236
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2005 ◽
Vol 34
(6)
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pp. 740-745
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