Inductively Coupled Plasma Etching and Electrically Active Damage of
Bulk, Single-Crystal Ga2O3
2017 ◽
Vol 35
(3)
◽
pp. 031205
◽
2014 ◽
Vol 25
(1)
◽
pp. 015016
◽
2019 ◽
Vol 39
(9)
◽
pp. 2831-2838
◽
2007 ◽
2005 ◽
Vol 23
(5)
◽
pp. 2236
◽
2005 ◽
Vol 34
(6)
◽
pp. 740-745
◽