Modeling of silicon etching using Bosch process: Effects of oxygen addition on the plasma and surface properties

The cryogenic process is well known to etch high aspect ratio features in silicon with smooth sidewalls. A time-multiplexed cryogenic process, called STiGer, was developed in 2006 and patented. Like the Bosch process, it consists in repeating cycles composed of an isotropic etching step followed by a passivation step. If the etching step is similar for both processes, the passivation step is a SiF4/O2 plasma that efficiently deposits a SiOxFy layer on the sidewalls only if the substrate is cooled at cryogenic temperature. In this paper, it is shown that the STiGer process can achieve profiles and performances equivalent to the Bosch process. However, since sidewall passivation is achieved with polymer free plasma chemistry, less frequent chamber cleaning is necessary, which contributes to increase the throughput.

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Biological and Surface Properties of C-Type Virus Particles Produced by Novikoff Ascites Hepatoma Cells

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100079395 ◽

1977 ◽

Vol 35 ◽

pp. 388-389

Author(s):

D.C. Hixson ◽

J.C. Chan ◽

J.M. Bowen ◽

E.F. Walborg

Keyword(s):

Surface Properties ◽

Ricinus Communis ◽

Rat Kidney ◽

Leukemia Virus ◽

Viral Envelope ◽

Virus Particles ◽

Chemically Induced ◽

Sarcoma Virus ◽

Hepatocarcinoma Cells ◽

Type C

Several years ago Karasaki (1) reported the production of type C virus particles by Novikoff ascites hepatocarcinoma cells. More recently, Weinstein (2) has reported the presence of type C virus particles in cell cultures derived from transplantable and primary hepatocellular carcinomas. To date, the biological function of these virus and their significance in chemically induced hepatocarcinogenesis are unknown. The present studies were initiated to determine a possible role for type C virus particles in chemically induced hepatocarcinogenesis. This communication describes results of studies on the biological and surface properties of type C virus associated with Novikoff hepatocarcinoma cells.Ecotropic and xenotropic murine leukemia virus (MuLV) activity in ascitic fluid of Novikoff tumor-bearing rats was assayed in murine sarcoma virus transformed S+L- mouse cells and S+L- mink cells, respectively. The presence of sarcoma virus activity was assayed in non-virus-producing normal rat kidney (NRK) cells. Ferritin conjugates of concanavalin A (Fer-Con wheat germ agglutinin (Fer-WGA), and Ricinus communis agglutinins I and II (Fer-RCAI and Fer-RCAII) were used to probe the structure and topography of saccharide determinants present on the viral envelope.

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Inelastic scattering at surfaces and interfaces

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100143560 ◽

1986 ◽

Vol 44 ◽

pp. 392-393

Author(s):

R. H. Ritchie ◽

A. Howie

Keyword(s):

Inelastic Scattering ◽

Surface Properties ◽

Correlation Energy ◽

Condensed Matter ◽

Charged Particles ◽

Condensed Matter Physics ◽

Optical Phonons ◽

Exchange Correlation ◽

Surfaces And Interfaces ◽

Inelastic Interactions

An important part of condensed matter physics in recent years has involved detailed study of inelastic interactions between swift electrons and condensed matter surfaces. Here we will review some aspects of such interactions.Surface excitations have long been recognized as dominant in determining the exchange-correlation energy of charged particles outside the surface. Properties of surface and bulk polaritons, plasmons and optical phonons in plane-bounded and spherical systems will be discussed from the viewpoint of semiclassical and quantal dielectric theory. Plasmons at interfaces between dissimilar dielectrics and in superlattice configurations will also be considered.

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