Control of ion bombardment energy in the low‐temperature deposition of highly transparent and conducting In2O3 and ZnO thin films by activated reactive evaporation

1988 ◽  
Vol 6 (3) ◽  
pp. 2015-2019 ◽  
Author(s):  
W. S. Lau
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Ion Bombardment ◽  
Zno Thin Films ◽  
Reactive Evaporation ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Activated Reactive Evaporation ◽  
Bombardment Energy

Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering technique

2006 ◽  
Vol 496 (1) ◽  
pp. 112-116 ◽  
Author(s):  
A.N. Banerjee ◽  
C.K. Ghosh ◽  
K.K. Chattopadhyay ◽  
Hideki Minoura ◽  
Ajay K. Sarkar ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Zno Thin Films ◽  
Glass Substrates ◽  
Dc Sputtering ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Dc Sputtering Technique

Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films

2010 ◽  
Vol 31 (8) ◽  
pp. 083005 ◽  
Author(s):  
Zhang Huafu ◽  
Liu Hanfa ◽  
Lei Chengxin ◽  
Zhou Aiping ◽  
Yuan Changkun
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Doped Zno ◽  
Co Doped

Low Temperature Deposition of Ge Thin Films for Phase Change Memory

2019 ◽  
Vol 11 (7) ◽  
pp. 269-278 ◽  
Author(s):  
Tianniu Chen ◽  
Chongying Xu ◽  
William Hunks ◽  
Matthias Stender ◽  
Gregory T. Stauf ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Phase Change ◽  
Phase Change Memory ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Change Memory
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