Two‐dimensional mapping of plasma parameters using probes in an electron cyclotron resonance etching device
1993 ◽
Vol 11
(4)
◽
pp. 1317-1322
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Keyword(s):
2012 ◽
Vol 83
(2)
◽
pp. 02A317
◽
Keyword(s):
1986 ◽
Vol 20
(2-3)
◽
pp. 259-284
◽
1996 ◽
Vol 35
(Part 2, No. 11B)
◽
pp. L1494-L1497
◽
2007 ◽
Vol 78
(5)
◽
pp. 053301
◽
Keyword(s):
1999 ◽
Vol 38
(Part 1, No. 7B)
◽
pp. 4329-4332
◽
2002 ◽
Vol 11
(3)
◽
pp. 260-265
◽