Microcrystalline oxide-incorporated new diffusion barrier for dynamic random access memory and ferroelectric random access memory capacitor electrode
1997 ◽
Vol 15
(5)
◽
pp. 2781-2786
◽
1996 ◽
Vol 35
(Part 1, No. 2B)
◽
pp. 1086-1089
◽
2002 ◽
Vol 12
(5)
◽
pp. 373
◽
1999 ◽
Vol 17
(4)
◽
pp. 1470
◽
2003 ◽
Vol 48
(4)
◽
pp. 275-371
◽
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 9B)
◽
pp. 4976-4979
◽
2021 ◽
Vol 21
(8)
◽
pp. 4216-4222
Keyword(s):
2004 ◽
Vol 43
(5A)
◽
pp. 2457-2461
◽