Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source
1999 ◽
Vol 17
(1)
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pp. 14-18
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1998 ◽
Vol 287-288
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pp. 181-184
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2015 ◽
Vol 191
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pp. 7-14
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2013 ◽
Vol 52
(1S)
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pp. 01AC09
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2000 ◽
Vol 36
(5)
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pp. 2927-2929
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Keyword(s):
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2020 ◽
Vol 816
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pp. 152532
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Keyword(s):
2007 ◽
Vol 299
(2)
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pp. 349-357
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