Electron beam deposition of cobalt on the silicon substrate: Experiment and simulation

2021 ◽  
Vol 39 (6) ◽  
pp. 064201
Author(s):  
Pavel E. L'vov ◽  
Sergey V. Bulyarskiy ◽  
Alexander N. Saurov ◽  
Vyacheslav V. Svetukhin ◽  
Alexey I. Terentyev
Keyword(s):  
Electron Beam ◽  
Silicon Substrate ◽  
Electron Beam Deposition ◽  
Experiment And Simulation ◽  
Beam Deposition

Electron beam deposition of ZrO2ZnO films

1996 ◽  
Vol 290-291 ◽  
pp. 80-83 ◽  
Author(s):  
S.B. Qadri ◽  
E.F. Skelton ◽  
P. Lubitz ◽  
N.V. Nguyen ◽  
H.R. Khan
Keyword(s):  
Electron Beam ◽  
Zno Films ◽  
Electron Beam Deposition ◽  
Beam Deposition

scholarly journals Electron-beam deposition of metals for mask repair

2003 ◽  
Vol 9 (S02) ◽  
pp. 984-985
Author(s):  
Young Choi ◽  
David C Joy
Keyword(s):  
Electron Beam ◽  
Electron Beam Deposition ◽  
Beam Deposition

scholarly journals Optical characterization of photosensitive AMTIR-1 chalcogenide thin layers deposited by electron beam deposition

2016 ◽  
Vol 442 ◽  
pp. 22-28 ◽  
Author(s):  
Alexandre Joërg ◽  
Fabien Lemarchand ◽  
Mengxue Zhang ◽  
Michel Lequime ◽  
Julien Lumeau
Keyword(s):  
Electron Beam ◽  
Optical Characterization ◽  
Thin Layers ◽  
Electron Beam Deposition ◽  
Beam Deposition

Electron-beam deposition of vanadium dioxide thin films

2012 ◽  
Vol 111 (3) ◽  
pp. 975-981 ◽  
Author(s):  
R. E. Marvel ◽  
K. Appavoo ◽  
B. K. Choi ◽  
J. Nag ◽  
R. F. Haglund
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Vanadium Dioxide ◽  
Electron Beam Deposition ◽  
Vanadium Dioxide Thin Films ◽  
Beam Deposition

Aging process of photosensitive chalcogenide films deposited by electron beam deposition

2011 ◽  
Vol 509 (27) ◽  
pp. 7330-7336 ◽  
Author(s):  
F. Charpentier ◽  
M. Dussauze ◽  
M. Cathelinaud ◽  
G. Delaizir ◽  
E.I. Kamitsos ◽  
...  
Keyword(s):  
Electron Beam ◽  
Aging Process ◽  
Chalcogenide Films ◽  
Electron Beam Deposition ◽  
Beam Deposition

Electrochromic properties of manganese oxide (MnOx) thin films made by electron beam deposition

1993 ◽  
Author(s):  
Olof Erlandsson ◽  
Johannes Lindvall ◽  
Ngoc T. Nguyen ◽  
Van H. Nguyen ◽  
Thi Bich Vu ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Manganese Oxide ◽  
Electrochromic Properties ◽  
Electron Beam Deposition ◽  
Beam Deposition

XRD Investigation of Residual Stresses in Electron Beam Deposited Pt-V Coatings

2010 ◽  
Vol 652 ◽  
pp. 303-308
Author(s):  
T.P. Ntsoane ◽  
M. Topic ◽  
R. Bucher
Keyword(s):  
Mechanical Properties ◽  
Electron Beam ◽  
X Rays ◽  
Deposition Technique ◽  
Layer System ◽  
Si Substrates ◽  
Coating Morphology ◽  
Electron Beam Deposition ◽  
Beam Deposition ◽  
Star Detector

Platinum and platinum alloys, due to their good electrical and mechanical properties, are commonly used in fields such as jewellery, catalysis and electronics. In this work, a two-layer system of Pt and V, deposited on Si substrates by electron beam deposition technique, were investigated amongst others for residual stress development in the coating. The investigation was carried out using diffraction techniques employing laboratory X-rays on the BRUKER D8 Discover instrument equipped with a High Star detector and analyzed with LEPTOS v6 software. The results showed the stress state to be tensile, relaxing significantly on annealing. In addition, complementary results of phase composition, and coating morphology will also be presented.

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