Optimization of low-voltage electron optics

1993 ◽  
Author(s):  
Laurence S. Hordon ◽  
Zhirong Huang ◽  
Raymond Browning ◽  
Nadim I. Maluf ◽  
Roger Fabian W. Pease
Author(s):  
Huang Min ◽  
P.S. Flora ◽  
C.J. Harland ◽  
J.A. Venables

A cylindrical mirror analyser (CMA) has been built with a parallel recording detection system. It is being used for angular resolved electron spectroscopy (ARES) within a SEM. The CMA has been optimised for imaging applications; the inner cylinder contains a magnetically focused and scanned, 30kV, SEM electron-optical column. The CMA has a large inner radius (50.8mm) and a large collection solid angle (Ω > 1sterad). An energy resolution (ΔE/E) of 1-2% has been achieved. The design and performance of the combination SEM/CMA instrument has been described previously and the CMA and detector system has been used for low voltage electron spectroscopy. Here we discuss the use of the CMA for ARES and present some preliminary results.The CMA has been designed for an axis-to-ring focus and uses an annular type detector. This detector consists of a channel-plate/YAG/mirror assembly which is optically coupled to either a photomultiplier for spectroscopy or a TV camera for parallel detection.


Author(s):  
Arthur V. Jones

In comparison with the developers of other forms of instrumentation, scanning electron microscope manufacturers are among the most conservative of people. New concepts usually must wait many years before being exploited commercially. The field emission gun, developed by Albert Crewe and his coworkers in 1968 is only now becoming widely available in commercial instruments, while the innovative lens designs of Mulvey are still waiting to be commercially exploited. The associated electronics is still in general based on operating procedures which have changed little since the original microscopes of Oatley and his co-workers.The current interest in low-voltage scanning electron microscopy will, if sub-nanometer resolution is to be obtained in a useable instrument, lead to fundamental changes in the design of the electron optics. Perhaps this is an opportune time to consider other fundamental changes in scanning electron microscopy instrumentation.


2011 ◽  
Vol 98 (17) ◽  
pp. 174103 ◽  
Author(s):  
Osamu Kamimura ◽  
Yosuke Maehara ◽  
Takashi Dobashi ◽  
Keita Kobayashi ◽  
Ryo Kitaura ◽  
...  

1994 ◽  
Author(s):  
Yuri V. Gulyaev ◽  
I. S. Nefyodov ◽  
A. V. Nechaev ◽  
Nickolay I. Sinitsyn ◽  
Gennadii V. Torgashov ◽  
...  

2011 ◽  
Vol 306-307 ◽  
pp. 251-254 ◽  
Author(s):  
Shreyas S. Pitale ◽  
L.L. Noto ◽  
I.M. Nagpure ◽  
O.M. Ntwaeaborwa ◽  
J.J. Terblans ◽  
...  

Zn3Ta2O8 is a promising host for low voltage cathodoluminescence (CL) applications. Surface chemical stability during low voltage electron beam excitation is a prime concern for phosphors to be used in various new generation information displays. Photoluminescence (PL) and CL characteristics of the Zn3Ta2O8 host doped with Pr3+ are presented. The phosphors were synthesized via solid-state reaction route at 1100°C. Red CL or PL with a maximum at 611 nm, attributed to the 1D2-3H4 transition of the Pr3+ ion, was observed at room temperature under high energy electron (2 keV, 12 μA) or a monochromatic xenon lamp (257 nm) irradiation. Electron stimulated chemical changes on the surface of the Zn3Ta2O8:Pr3+ phosphor during an electron beam exposure from 0-350 C/cm2 was monitored using Auger electron spectroscopy. The CL exhibited only a 20% loss in the original intensity during the continuous electron beam exposure. X-ray photoelectron spectroscopy (XPS) was used to estimate the redox states of the chemical constituents and a comparison of binding energies was made with the standard Ta2O5 and ZnO compounds. A correlation between the structural configuration of Zn3Ta2O8 and the XPS data is also established.


1994 ◽  
Vol 64 (3) ◽  
pp. 390-392 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  

2005 ◽  
Vol 11 (S02) ◽  
Author(s):  
L F Drummy ◽  
D M Phillips ◽  
H Koerner ◽  
R A Vaia ◽  
B L Farmer ◽  
...  

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