A high thermal resistance MEMS-based Pirani vacuum sensor chip
2015 ◽
Vol 135
(5)
◽
pp. 171-177
2014 ◽
Vol 132
(8)
◽
pp. n/a-n/a
◽
2018 ◽
Vol 193
(3-4)
◽
pp. 578-584
◽
2009 ◽
pp. 651-651-10
◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 220-221
◽
pp. 218-223