Demonstrating the value of integrated reticle automation solutions in high volume wafer fab manufacturing

2019 ◽  
Author(s):  
Chien Ming Wu ◽  
Chin Kuei Chang ◽  
Yousheng Yin ◽  
Jeffery Liang ◽  
Chia Ping Chen ◽  
...  
Keyword(s):  
Author(s):  
D. E. Fornwalt ◽  
A. R. Geary ◽  
B. H. Kear

A systematic study has been made of the effects of various heat treatments on the microstructures of several experimental high volume fraction γ’ precipitation hardened nickel-base alloys, after doping with ∼2 w/o Hf so as to improve the stress rupture life and ductility. The most significant microstructural chan§e brought about by prolonged aging at temperatures in the range 1600°-1900°F was the decoration of grain boundaries with precipitate particles.Precipitation along the grain boundaries was first detected by optical microscopy, but it was necessary to use the scanning electron microscope to reveal the details of the precipitate morphology. Figure 1(a) shows the grain boundary precipitates in relief, after partial dissolution of the surrounding γ + γ’ matrix.


Author(s):  
M.G. Burke ◽  
M.K. Miller

Interpretation of fine-scale microstructures containing high volume fractions of second phase is complex. In particular, microstructures developed through decomposition within low temperature miscibility gaps may be extremely fine. This paper compares the morphological interpretations of such complex microstructures by the high-resolution techniques of TEM and atom probe field-ion microscopy (APFIM).The Fe-25 at% Be alloy selected for this study was aged within the low temperature miscibility gap to form a <100> aligned two-phase microstructure. This triaxially modulated microstructure is composed of an Fe-rich ferrite phase and a B2-ordered Be-enriched phase. The microstructural characterization through conventional bright-field TEM is inadequate because of the many contributions to image contrast. The ordering reaction which accompanies spinodal decomposition in this alloy permits simplification of the image by the use of the centered dark field technique to image just one phase. A CDF image formed with a B2 superlattice reflection is shown in fig. 1. In this CDF micrograph, the the B2-ordered Be-enriched phase appears as bright regions in the darkly-imaging ferrite. By examining the specimen in a [001] orientation, the <100> nature of the modulations is evident.


2007 ◽  
Vol 177 (4S) ◽  
pp. 331-331 ◽  
Author(s):  
Stephen D.W. Beck ◽  
Richard S. Foster ◽  
Richard Bihrle ◽  
John P. Donohue

2006 ◽  
Vol 175 (4S) ◽  
pp. 8-9 ◽  
Author(s):  
Brent K. Hollenbeck ◽  
Yongliang Wei ◽  
John D. Birkmeyer

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