The effect of performance standards in a high volume wafer fab

A proper understanding of transistor and other circuit-element behavior is critical in the design process of integrated circuits intended for high-volume production or exacting performance standards. Models of such elements are a key ingredient in the circuit-simulation task, which provides design-verification feedback to chip designers. Failures in this process can have costly consequences. Much of the effort put into modelling work contributes very little to real needs as practical failures are usually at the much more gross level of user input or program-coding problems.

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Development of the yield enhancement system of a high-volume 8-inch wafer fab

Proceedings of International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.1995.524357 ◽

2002 ◽

Cited By ~ 1

Author(s):

Ping Wang ◽

M. Chan ◽

R. Goodner ◽

F. Lee ◽

R. Ceton

Keyword(s):

High Volume ◽

Yield Enhancement ◽

Wafer Fab

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Wip balance and due date control in a wafer fab with low and high volume products

Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2012.6464989 ◽

2012 ◽

Cited By ~ 6

Author(s):

Zhugen Zhou ◽

Oliver Rose

Keyword(s):

High Volume ◽

Due Date ◽

Wafer Fab

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Morphology, Distribution and Identification of Micro-Constituents Along Grain Boundaries in Nickel-Base Alloys

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100071326 ◽

1973 ◽

Vol 31 ◽

pp. 176-177

Author(s):

D. E. Fornwalt ◽

A. R. Geary ◽

B. H. Kear

Keyword(s):

Electron Microscope ◽

Grain Boundaries ◽

Volume Fraction ◽

Rupture Life ◽

Stress Rupture ◽

High Volume ◽

Precipitate Morphology ◽

Stress Rupture Life ◽

Nickel Base ◽

Scanning Electron

A systematic study has been made of the effects of various heat treatments on the microstructures of several experimental high volume fraction γ’ precipitation hardened nickel-base alloys, after doping with ∼2 w/o Hf so as to improve the stress rupture life and ductility. The most significant microstructural chan§e brought about by prolonged aging at temperatures in the range 1600°-1900°F was the decoration of grain boundaries with precipitate particles.Precipitation along the grain boundaries was first detected by optical microscopy, but it was necessary to use the scanning electron microscope to reveal the details of the precipitate morphology. Figure 1(a) shows the grain boundary precipitates in relief, after partial dissolution of the surrounding γ + γ’ matrix.

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A Comparison of Tem and Apfim to the Interpretation of Modulated Microstructures

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010011742x ◽

1985 ◽

Vol 43 ◽

pp. 70-71

Author(s):

M.G. Burke ◽

M.K. Miller

Keyword(s):

Low Temperature ◽

Microstructural Characterization ◽

Superlattice Reflection ◽

High Volume ◽

Atom Probe ◽

Dark Field ◽

Miscibility Gap ◽

Second Phase ◽

Two Phase ◽

Probe Field

Interpretation of fine-scale microstructures containing high volume fractions of second phase is complex. In particular, microstructures developed through decomposition within low temperature miscibility gaps may be extremely fine. This paper compares the morphological interpretations of such complex microstructures by the high-resolution techniques of TEM and atom probe field-ion microscopy (APFIM).The Fe-25 at% Be alloy selected for this study was aged within the low temperature miscibility gap to form a <100> aligned two-phase microstructure. This triaxially modulated microstructure is composed of an Fe-rich ferrite phase and a B2-ordered Be-enriched phase. The microstructural characterization through conventional bright-field TEM is inadequate because of the many contributions to image contrast. The ordering reaction which accompanies spinodal decomposition in this alloy permits simplification of the image by the use of the centered dark field technique to image just one phase. A CDF image formed with a B2 superlattice reflection is shown in fig. 1. In this CDF micrograph, the the B2-ordered Be-enriched phase appears as bright regions in the darkly-imaging ferrite. By examining the specimen in a [001] orientation, the <100> nature of the modulations is evident.

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