Design of a tomographic projection lithography process for roll-to-roll fabrication of 3D microstructures

2021 ◽  
Author(s):  
Joseph Toombs ◽  
Hayden K. Taylor
Keyword(s):  
Lithography Process ◽  
Roll To Roll ◽  
Projection Lithography ◽  
Tomographic Projection

Roll-to-Roll, Projection Lithography System for High-Resolution Patterning of Flexible Substrates, Volume 1

1999 ◽  
Author(s):  
K. Jain ◽  
T. J. Dunn ◽  
N. Farmiga ◽  
M. Zemel
Keyword(s):  
High Resolution ◽  
Flexible Substrates ◽  
Roll To Roll ◽  
Projection Lithography ◽  
Lithography System

Rapid biochemical functionalization of technical surfaces by means of a photobleaching-based maskless projection lithography process

2013 ◽  
Author(s):  
Ansgar Waldbaur ◽  
Björn Waterkotte ◽  
Juerg Leuthold ◽  
Katja Schmitz ◽  
Bastian E. Rapp
Keyword(s):  
Lithography Process ◽  
Projection Lithography

Ion projection lithography process on dry resist

1991 ◽  
Vol 55 (1-4) ◽  
pp. 902-904 ◽  
Author(s):  
A.I. Kholopkin ◽  
M.N. Lyakhov ◽  
D.A. Pankratenko ◽  
V.V. Simonov ◽  
A.F. Vyatkin
Keyword(s):  
Lithography Process ◽  
Projection Lithography ◽  
Ion Projection Lithography

The Fabrication of a Cylindrical Nano Mold Based on UV Photolithography

2020 ◽  
Vol 12 (3) ◽  
pp. 407-411
Author(s):  
Pan Kyeom Kim ◽  
Sung-Il Chung ◽  
Tae-Gyu Ha ◽  
Myung Yung Jeong
Keyword(s):  
Phase Shift ◽  
Surface Area ◽  
Mass Production ◽  
Production Efficiency ◽  
Metal Plate ◽  
Nano Structure ◽  
Lithography Process ◽  
Roll To Roll ◽  
Processing Ability ◽  
Improve Production Efficiency

The field of nanotechnology is predicted to lead to breakthroughs in many industrial fields. However, inadequate capability for mass production is a large hurdle in the advancement of this industry. To overcome the shortfall in production of nanotechnological devices, we designed a cylindrical nano mold used in the roll-to-roll process with a large surface area to improve production efficiency. The nano structure was fabricated using the UV-based phase shift edge lithography process and duplicated onto a metal plate. The nano patterned metal plate was rolled onto a cylindrical core to complete the cylindrical nano mold. We confirmed the processing ability of the mold by experimentally conducting the nano imprinting process and analyzing the results.

Influence of Coulomb effects on electron projection lithography process

2004 ◽  
Vol 22 (6) ◽  
pp. 2891 ◽  
Author(s):  
Jiro Yamamoto ◽  
Hiroshi Yamashita ◽  
Masaki Yamabe ◽  
Hiroshi Arimoto
Keyword(s):  
Lithography Process ◽  
Projection Lithography ◽  
Coulomb Effects

Depth selective laser scribing of thin films for roll-to-roll production of silicon solar cells

2009 ◽  
Author(s):  
Jochen Löffler ◽  
Laurie Wipliez ◽  
Martijn de Keijzer ◽  
Johan Bosman ◽  
Wim Soppe
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Silicon Solar Cells ◽  
Laser Scribing ◽  
Roll To Roll

Adjustable wetting of Liquid Flame Spray (LFS) TiO2-nanoparticle coated board: Batch-type versus roll-to-roll stimulation methods

2014 ◽  
Vol 29 (2) ◽  
pp. 271-279 ◽  
Author(s):  
Mikko Tuominen ◽  
Hannu Teisala ◽  
Janne Haapanen ◽  
Mikko Aromaa ◽  
Jyrki M. Mäkelä ◽  
...  
Keyword(s):  
Argon Plasma ◽  
Ultra Violet ◽  
High Volume ◽  
Point Of View ◽  
Flame Spray ◽  
Ambient Conditions ◽  
Batch Type ◽  
Roll To Roll ◽  
Long Time ◽  
Liquid Flame Spray

Abstract Superhydrophobic nanoparticle coating was created on the surface of board using liquid flame spray (LFS). The LFS coating was carried out continuously in ambient conditions without any additional hydrophobization steps. The contact angle of water (CAW) of ZrO2, Al2O3 and TiO2 coating was adjusted reversibly from >150° down to ~10−20° using different stimulation methods. From industrial point of view, the controlled surface wetting has been in focus for a long time because it defines the liquid-solid contact area, and furthermore can enhance the mechanical and chemical bonding on the interface between the liquid and the solid. The used stimulation methods included batch-type methods: artificial daylight illumination and heat treatment and roll-to-roll methods: corona, argon plasma, IR (infra red)- and UV (ultra violet)-treatments. On the contrary to batch-type methods, the adjustment and switching of wetting was done only in seconds or fraction of seconds using roll-to-roll stimulation methods. This is significant in the converting processes of board since they are usually continuous, high volume operations. In addition, the creation of microfluidic patterns on the surface of TiO2 coated board using simple photomasking and surface stimulation was demonstrated. This provides new advantages and possibilities, especially in the field of intelligent printing. Limited durability and poor repellency against low surface tension liquids are presently the main limitations of LFS coatings.

Excimer Projection Lithography at 193-nm Wavelength

1988 ◽  
Author(s):  
M. Rothschild ◽  
D. J. Ehrlich
Keyword(s):  
Projection Lithography ◽  
193 Nm
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