Study on modeling of resist surface charge effect on mask blanks with charge dissipation layer in electron beam mask writers
2020 ◽
Vol 25
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pp. 101413
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2015 ◽
Vol 128
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pp. 439-447
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pp. 1754-1763
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Vol 199
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pp. 242-247
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Vol 31
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pp. 623-629
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2016 ◽
Vol 120
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pp. 22718-22729
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