Modeling and simulation of a silicon microdiaphragm piezoresistive pressure sensor using finite element analysis (FEA) tools
2002 ◽
Vol 68
(668)
◽
pp. 682-689
◽
2017 ◽
Vol 2017.8
(0)
◽
pp. PN-98
Keyword(s):
Keyword(s):
2014 ◽
Vol 635-637
◽
pp. 1335-1340
◽
1997 ◽
Vol 1
(2)
◽
pp. 173-183
◽