Fourier Transform Infrared (FTIR) Determination Of Interstitial Oxygen Concentration Of Single-Side-Polished Silicon Wafers

1989 ◽  
Author(s):  
Brian Rennex
2004 ◽  
Vol 502 (2) ◽  
pp. 213-220 ◽  
Author(s):  
Guillermo Quintás ◽  
Asunción Morales-Noé ◽  
Sergio Armenta ◽  
Salvador Garrigues ◽  
Miguel de la Guardia

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