Analysis of low-energy boron implants in silicon
Keyword(s):
Low-energy boron implants in silicon are analyzed using secondary-ion mass spectroscopy and standard junction and sheet-resistance measurement techniques. Implantation of 11B+ is compared with that of [Formula: see text]. The concentration profiles are compared with Linhard–Scharf–Schiott theory and improved range parameters are obtained.
1977 ◽
Vol 25
(3)
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pp. 251-262
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2008 ◽
Vol 266
(10)
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pp. 2450-2452
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2011 ◽
Vol 82
(3)
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pp. 033101
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2015 ◽
Vol 648
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pp. 412-417
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2001 ◽
Vol 148
(5)
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pp. F92
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Keyword(s):