Dissolution characteristics of poly(methyl methacrylate) as an X-ray resist
A reversion in the dissolution characteristics of X-ray irradiated poly(methyl methacrylate) (PMMA) is shown experimentally, and a model is developed to explain the behaviour. The PMMA has been irradiated with 11 kV Cu X-rays to doses up to 240 μA∙min∙cm−2 at dose rates of 4 and 8 μA∙cm−2. The doses are determined by photoelectron emission and are therefore only relative measurements. The dissolution rate of the irradiated PMMA in a 1:2 developer of methyl isobutyl ketone and isopropyl alcohol is measured as a function of X-ray dose. For the first time, a model is developed that predicts this reversion in the dissolution rate. For the model to predict a reversion point, it is necessary to treat the processes of chain scission and cross-linking as operating on separate sites. The main requirement here is that cross-linked bonds do not become sites for scission. If this requirement is not made, no reversion is predicted.