LIGA Technologies and Applications

MRS Bulletin ◽  
2001 ◽  
Vol 26 (4) ◽  
pp. 337-340 ◽  
Author(s):  
Jill Hruby
Keyword(s):  
Synchrotron Radiation ◽  
Methyl Methacrylate ◽  
Light Source ◽  
High Energy ◽  
X Rays ◽  
Electromechanical Systems ◽  
X Ray ◽  
Poly Methyl Methacrylate

LIGA, an acronym for the German words for lithography, electroplating, and molding, is a technique used to produce micro-electromechanical systems (MEMS) made from metals, ceramics, or plastics. The LIGA process utilizes x-ray synchrotron radiation as a lithographic light source. Highly collimated, high-energy x-rays from the synchrotron impinge on a patterned mask in proximity to an x-ray-sensitive photoresist, typically poly(methyl methacrylate) (PMMA).

Micro-X-Ray Fluorescence Analysis on a Synchrotron Radiation Wiggler Beam Line

1991 ◽  
Vol 35 (B) ◽  
pp. 995-1000
Author(s):  
J.V. Gilfrich ◽  
E.F. Skelton ◽  
S.B. Qadri ◽  
N.E. Moulton ◽  
D.J. Nagel ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
National Laboratory ◽  
Incident Beam ◽  
Fluorescence Analysis ◽  
High Energy ◽  
Brookhaven National Laboratory ◽  
Beam Line ◽  
X Rays ◽  
X Ray ◽  
Electron Orbit

AbstractIt has been well established over recent years that synchrotron radiation possesses some unique features as a source of primary x-rays for x-ray fluorescence analysis. Advantage has been taken of the high intensity emanating from the bending magnets of storage rings to develop x-ray microprobes utilizing apertures or focussing optics, or both, to provide a beam spot at the specimen of the order of micrometers. The use of insertion devices wigglers and undulatora, can further increase the available intensity, especially for the high energy photons. Beam Line X-17C at the National Synchrotron Light Source (NSLS) at Brookhaven National Laboratory, accepts the unmodified continuum radiation from a superconducting wiggler in the storage ring. Some initial XRF measurements have been made on this beam line using apertures in the 10 to 100 micrometer range. The fluorescent radiation was measured by an intrinsic Ge detector having an energy resolution of 300 eV at 15 kev, and located at 90° to the incident beam in the plane of the electron orbit. In samples containing many elements, detection limits of a few ppm were achieved with 100 μm beams.

Performance of BL07A at NewSUBARU with installation of a new multi-layered-mirror monochromator

2021 ◽  
Vol 28 (2) ◽  
pp. 618-623
Author(s):  
Shotaro Tanaka ◽  
Shuto Suzuki ◽  
Tomohiro Mishima ◽  
Kazuhiro Kanda
Keyword(s):  
Synchrotron Radiation ◽  
Energy Range ◽  
Light Source ◽  
Monochromatic Light ◽  
High Vacuum ◽  
Photon Flux ◽  
X Rays ◽  
Monochromatic Beam ◽  
X Ray ◽  
High Photon Flux

Soft X-rays excite the inner shells of materials more efficiently than any other form of light. The investigation of synchrotron radiation (SR) processes using inner-shell excitation requires the beamline to supply a single-color and high-photon-flux light in the soft X-ray region. A new integrated computing multi-layered-mirror (MLM) monochromator was installed at beamline 07A (BL07A) of NewSUBARU, which has a 3 m undulator as a light source for irradiation experiments with high-photon-flux monochromatic light. The MLM monochromator has a high reflectivity index in the soft X-ray region; it eliminates unnecessary harmonic light from the undulator and lowers the temperature of the irradiated sample surfaces. The monochromator can be operated in a high vacuum, and three different mirror pairs are available for different experimental energy ranges; they can be exchanged without exposing the monochromator to the atmosphere. Measurements of the photon current of a photodiode on the sample stage indicated that the photon flux of the monochromatic beam was more than 1014 photons s−1 cm−2 in the energy range 80–400 eV and 1013 photons s−1 cm−2 in the energy range 400–800 eV. Thus, BL07A is capable of performing SR-stimulated process experiments.

ABLATION OF POLY(METHYL METHACRYLATE) BY A SINGLE PULSE OF SOFT X-RAYS EMITTED FROM Z-PINCH AND LASER-PRODUCED PLASMAS

2002 ◽  
Vol 09 (01) ◽  
pp. 347-352 ◽  
Author(s):  
L. JUHA ◽  
J. KRÁSA ◽  
A. PRÄG ◽  
A. CEJNAROVÁ ◽  
D. CHVOSTOVÁ ◽  
...  
Keyword(s):  
Methyl Methacrylate ◽  
Single Pulse ◽  
Polymer Structure ◽  
Molecular Fragment ◽  
X Rays ◽  
Radiation Chemical ◽  
X Ray ◽  
Poly Methyl Methacrylate ◽  
Promising Application ◽  
Z Pinch

The efficiency of ablation induced in poly(methyl methacrylate) (PMMA) by single soft X-ray pulses emitted from Z-pinch and laser-produced plasmas was determined. X-ray ablation of PMMA was found to be less efficient than that of teflon (PTFE). Nonthermal effects of the radiation on the polymer structure play a key role in the mechanisms of the ablation, i.e. the ablation can be explained by the formation of radiation-chemical scissions of the polymer chain followed by blowoff of low-molecular fragment fluid into the vacuum. The most promising application of this phenomenon seems to be micropatterning/micromachining.

scholarly journals Multi-wavelength Behaviour of III Zw2

2002 ◽  
Vol 19 (1) ◽  
pp. 73-76
Author(s):  
Nikita Salvi ◽  
Mat J. Page ◽  
Jason A. Stevens ◽  
Keith O. Mason ◽  
Kinwah Wu
Keyword(s):  
Synchrotron Radiation ◽  
Optical Emission ◽  
High Energy ◽  
X Rays ◽  
X Ray ◽  
High Energy Electrons ◽  
Photon Index ◽  
Multi Wavelength ◽  
Wavelength Light ◽  
Gaussian Line

AbstractIII Zw2 was observed with XMM-Newton in July 2000. Its X-ray spectrum can be described by a power law of photon index Γ≈1.7 with a Gaussian line at 6.7 KeV. There is no significant evidence of intrinsic absorption within the source or of a soft X-ray excess. Multi-wavelength light curves over a period of 25 years show related variations from the radio to X-rays. We interpret the radio to optical emission as synchrotron radiation, self-absorbed in the radio/millimetre region, and the X-rays as mainly due to Compton up-scattering of low energy photons by the population of high energy electrons that give rise to the synchrotron radiation.

scholarly journals Internal Strain Distribution of Laser Lap Joints in Steel under Loading Studied by High-Energy Synchrotron Radiation X-rays

2021 ◽  
Vol 5 (2) ◽  
pp. 17
Author(s):  
Takahisa Shobu ◽  
Ayumi Shiro ◽  
Fumiaki Kono ◽  
Toshiharu Muramatsu ◽  
Tomonori Yamada ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Strain Distribution ◽  
Measurement Techniques ◽  
Tensile Load ◽  
High Energy ◽  
Lap Joints ◽  
Internal Strain ◽  
High Energy Density ◽  
X Rays ◽  
X Ray

The automotive industries employ laser beam welding because it realizes a high energy density without generating irradiation marks on the opposite side of the irradiated surface. Typical measurement techniques such as strain gauges and tube X-rays cannot assess the localized strain at a joint weld. Herein high-energy synchrotron radiation X-ray diffraction was used to study the internal strain distribution of laser lap joint PNC-FMS steels (2- and 5-mm thick) under loading at a high temperature. As the tensile load increased, the local tensile and compressive strains increased near the interface. These changes agreed well with the finite element analysis results. However, it is essential to complementarily utilize internal defect observations by X-ray transmission imaging because the results depend on the defects generated by laser processing.

scholarly journals Implementation of cryogenic tender X-ray HR-XANES spectroscopy at the ACT station of the CAT-ACT beamline at the KIT Light Source

2022 ◽  
Vol 29 (1) ◽  
Author(s):  
Bianca Schacherl ◽  
Tim Prüssmann ◽  
Kathy Dardenne ◽  
Kirsten Hardock ◽  
Volker Krepper ◽  
...  
Keyword(s):  
Light Source ◽  
High Energy ◽  
Xanes Spectroscopy ◽  
Nuclear Waste Repository ◽  
X Rays ◽  
Edge Structure ◽  
X Ray ◽  
Analyzer Crystal ◽  
Institute Of Technology ◽  
X Ray Absorption

The ACT experimental station of the CAT-ACT wiggler beamline at the Karlsruhe Institute of Technology (KIT) Light Source is dedicated to the investigation of radionuclide materials with radioactivities up to 1000000 times the exemption limit by various speciation techniques applying monochromatic X-rays. In this article, the latest technological developments at the ACT station that enable high-resolution X-ray absorption near-edge structure (HR-XANES) spectroscopy for low radionuclide loading samples are highlighted – encompassing the investigation of actinide elements down to 1 p.p.m. concentration – combined with a cryogenic sample environment reducing beam-induced sample alterations. One important part of this development is a versatile gas tight plexiglass encasement ensuring that all beam paths in the five-analyzer-crystal Johann-type X-ray emission spectrometer run within He atmosphere. The setup enables the easy exchange between different experiments (conventional X-ray absorption fine structure, HR-XANES, high-energy or wide-angle X-ray scattering, tender to hard X-ray spectroscopy) and opens up the possibility for the investigation of environmental samples, such as specimens containing transuranium elements from contaminated land sites or samples from sorption and diffusion experiments to mimic the far field of a breached nuclear waste repository.

THE DOPPLER FACTORS AT X-RAY BAND OF THE BLAZARS

2005 ◽  
Vol 14 (06) ◽  
pp. 947-956
Author(s):  
D. C. MEI ◽  
L. ZHANG
Keyword(s):  
Synchrotron Radiation ◽  
Energy Range ◽  
High Energy ◽  
Low Energy ◽  
X Rays ◽  
X Ray ◽  
Inverse Compton Scattering ◽  
Inverse Compton ◽  
Doppler Factor ◽  
Intrinsic Radiation

We study the Doppler factors for a group blazars at soft X-ray band. In our estimates, we have made the assumptions that (i) blazars can be divided into high-energy-peaked (HEP) objects whose synchrotron peak frequencies νp > 1014.7 Hz , and the low-energy-peaked (LEP) objects whose synchrotron peak frequencies νp≤1014.7 Hz , and (ii) the intrinsic radiation from a blazar in the energy range from radio to soft X-ray bands is the synchrotron radiation for HEP objects and the soft X-ray emission comes from inverse Compton scattering for LEP objects. Under the above assumptions, we estimate Doppler factors at optical (δO) and X-rays (δx) for 54 blazars by using the known radio Doppler factors and the observed flux densities in radio, optical and X-ray bands, and Doppler factors [Formula: see text] at X-ray band in which X-rays are assumed to be produced only by the synchrotron radiation. We get [Formula: see text] . The Doppler factors are different in various wavebands, and on average, the Doppler factor decreases with frequency from radio to X-ray bands.

Dissolution characteristics of poly(methyl methacrylate) as an X-ray resist

1987 ◽  
Vol 65 (8) ◽  
pp. 975-978 ◽  
Author(s):  
E. M. Lehockey ◽  
J. D. Wice ◽  
I. Reid
Keyword(s):  
Methyl Methacrylate ◽  
Dissolution Rate ◽  
Chain Scission ◽  
X Rays ◽  
X Ray ◽  
Poly Methyl Methacrylate ◽  
Dose Rates ◽  
Main Requirement ◽  
Relative Measurements ◽  
First Time

A reversion in the dissolution characteristics of X-ray irradiated poly(methyl methacrylate) (PMMA) is shown experimentally, and a model is developed to explain the behaviour. The PMMA has been irradiated with 11 kV Cu X-rays to doses up to 240 μA∙min∙cm−2 at dose rates of 4 and 8 μA∙cm−2. The doses are determined by photoelectron emission and are therefore only relative measurements. The dissolution rate of the irradiated PMMA in a 1:2 developer of methyl isobutyl ketone and isopropyl alcohol is measured as a function of X-ray dose. For the first time, a model is developed that predicts this reversion in the dissolution rate. For the model to predict a reversion point, it is necessary to treat the processes of chain scission and cross-linking as operating on separate sites. The main requirement here is that cross-linked bonds do not become sites for scission. If this requirement is not made, no reversion is predicted.

Focusing high-energy x-rays by a PMMA compound x-ray lens on Beijing synchrotron radiation facility

2007 ◽  
Vol 16 (4) ◽  
pp. 984-988 ◽  
Author(s):  
Le Zi-Chun ◽  
Liang Jing-Qiu ◽  
Dong Wen ◽  
Zhu Pei-Ping ◽  
Peng Liang-Qiang ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
High Energy ◽  
X Rays ◽  
X Ray ◽  
Beijing Synchrotron Radiation Facility

TXRF with Various Excitation Sources

1991 ◽  
Vol 35 (B) ◽  
pp. 925-931 ◽  
Author(s):  
Peter Wobrauschek ◽  
Peter Kregsamer ◽  
Christina Streli ◽  
Robert Rieder ◽  
Hannes Aiginger
Keyword(s):  
Synchrotron Radiation ◽  
High Power ◽  
Spectral Distribution ◽  
Detection Limits ◽  
High Energy ◽  
Exciting Radiation ◽  
X Rays ◽  
Beam Path ◽  
X Ray ◽  
Excitation Conditions

AbstractImproving the detection limits in TXRF by optimizing the excitation conditions is the goal of this work. The properties of the exciting radiation due to spectral distribution, polarisation, intensity and energy are investigated and compared to find best conditions. Results are given from experiments performed with synchrotron radiation, Bragg polarized monoenergetic x-rays, high energy cut-off reflector in the primary beam path of a high power x-ray tube and several geometries for the sample reflector.

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