IMPROVEMENT ON CHARACTERISTICS OF FERROELECTRIC THIN FILMS USING SUPERCRITICAL CARBON DIOXIDE FLUID TREATMENT

2012 ◽  
Vol 06 ◽  
pp. 104-108
Author(s):  
CHIEN-MIN CHENG ◽  
MING-CHANG KUAN ◽  
KAI-HUNAG CHEN ◽  
JEN-HWAN TSAI
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Electrical Properties ◽  
Low Temperature ◽  
Supercritical Carbon Dioxide ◽  
Oxygen Vacancy ◽  
Current Density ◽  
Pure Water ◽  
Ferroelectric Thin Films ◽  
Supercritical Carbon

Electrical and physical properties of as-deposited Bi 3.9 La 0.1 Ti 2.9 V 0.1 O 12 (BLTV) ferroelectric thin films on SiO 2/ Si (100) substrates were improved by low temperature supercritical carbon dioxide fluid (SCF) process treatment. The as-deposited BLTV ferroelectric thin films were treated by SCF process which mixed with propyl alcohol and pure water. The memory windows increased in C-V curves, and the oxygen vacancy and defect in leakage current density curves were obtained after SCF process treatment. Finally, the improvement properties of as-deposited BLTV thin films after SCF process treatment were investigated by XPS, C-V, and J-E measurement. The mechanism concerning the dependence of electrical properties of the ferroelectric thin films on the SCF process was investigated and discussed.

Low Temperature Method for Enhancing Ferroelectric Thin Films in Non-Volatile Random Access Memory Devices

2011 ◽  
Vol 239-242 ◽  
pp. 2628-2631 ◽  
Author(s):  
Ming Chang Kuan ◽  
Kai Huang Chen ◽  
Wen Cheng Tzou ◽  
Chien Min Cheng ◽  
Yi Jun Lin
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Electrical Properties ◽  
Low Temperature ◽  
Oxygen Vacancy ◽  
Random Access ◽  
Random Access Memory ◽  
Ferroelectric Thin Films ◽  
Access Memory ◽  
Temperature Method

In this study, the electrical properties of as-deposited Sr0.4Ba0.6Nb2O6(SBN) ferroelectric thin films on SiO2/Si(100) substrates were improved by low temperature supercritical carbon dioxide fluid (SCF) process treatment. The as-deposited SBN ferroelectric thin films were treated by SCF process which mixed with pure H2O and propyl alcohol. After SCF process treatment, the memory windows increased in C-V curves, and the passivation of oxygen vacancy and defect in leakage current density curves were obtained. In addition, the improvement properties of as-deposited SBN thin films after SCF process treatment were found by XPS, C-V, and J-E measurement. Finally, the mechanism concerning the dependence of electrical properties of the SBN ferroelectric thin films on the SCF process was discussed.

Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) β-Diketone Complex

2009 ◽  
Vol 156 (6) ◽  
pp. H443 ◽  
Author(s):  
Masahiro Matsubara ◽  
Michiru Hirose ◽  
Kakeru Tamai ◽  
Yukihiro Shimogaki ◽  
Eiichi Kondoh
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Kinetics Of ◽  
Supercritical Carbon

scholarly journals Low-temperature and purification-free stereocontrolled ring-opening polymerisation of lactide in supercritical carbon dioxide

2020 ◽  
Vol 22 (7) ◽  
pp. 2197-2202 ◽  
Author(s):  
Simon P. Bassett ◽  
Andrew D. Russell ◽  
Paul McKeown ◽  
Isabel Robinson ◽  
Thomas R. Forder ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Low Temperature ◽  
Supercritical Carbon Dioxide ◽  
Ring Opening ◽  
Solvent Free ◽  
Free Ring ◽  
First Time ◽  
Supercritical Carbon

A stereoselective, solvent-free ring-opening polymerisation (ROP) of lactide (LA) in supercritical carbon dioxide (scCO2) is reported for the first time.

scholarly journals Dynamics of polymer thin films in supercritical carbon dioxide

2002 ◽  
Vol 60 (4) ◽  
pp. 559-565 ◽  
Author(s):  
T Koga ◽  
Y.-S Seo ◽  
X Hu ◽  
K Shin ◽  
Y Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Polymer Thin Films ◽  
Supercritical Carbon
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