A Fabrication Process of Self-Aligned Tantalum-Silicide Gate Gallium-Arsenide Metal-Semiconductor Field Effect Transistors with Tantalum-Silicide Cap-Annealing Technique

1996 ◽  
Vol 35 (Part 1, No. 5A) ◽  
pp. 2578-2582 ◽  
Author(s):  
Wan-Thai Hsu ◽  
Chuan-Cheng Tu ◽  
Wei-Su Chen ◽  
Fon-Shan Huang
1985 ◽  
Vol 32 (1) ◽  
pp. 61-66 ◽  
Author(s):  
A.J. Holden ◽  
D.R. Daniel ◽  
I. Davies ◽  
C.H. Oxley ◽  
H.D. Rees

Sign in / Sign up

Export Citation Format

Share Document