GaAs-Based Vertical-Cavity Surface-Emitting Laser on Si Substrate by Metalorganic Chemical Vapor Deposition

Yoshihiko Murata; Naoki Nakanishi; Takashi Egawa; Takashi Jimbo; Masayoshi Umeno

doi:10.1143/jjap.35.l1631

GaAs-Based Vertical-Cavity Surface-Emitting Laser on Si Substrate by Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.l1631 ◽

1996 ◽

Vol 35 (Part 2, No. 12B) ◽

pp. L1631-L1633 ◽

Cited By ~ 3

Author(s):

Yoshihiko Murata ◽

Naoki Nakanishi ◽

Takashi Egawa ◽

Takashi Jimbo ◽

Masayoshi Umeno

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Si Substrate ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity ◽

Metalorganic Chemical

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3.0-mW GaInNAs long-wavelength vertical-cavity surface-emitting laser grown by metalorganic chemical vapor deposition

10.1117/12.528771 ◽

2004 ◽

Author(s):

Tetsuo Nishida ◽

Mitsuru Takaya ◽

Satoshi Kakinuma ◽

Takeo Kaneko ◽

Tatsuya Shimoda

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Long Wavelength ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity ◽

Metalorganic Chemical

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Growth of vertical-cavity surface-emitting laser structures on GaAs (311)B substrates by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.119182 ◽

1997 ◽

Vol 70 (25) ◽

pp. 3395-3397 ◽

Cited By ~ 29

Author(s):

K. Tateno ◽

Y. Ohiso ◽

C. Amano ◽

A. Wakatsuki ◽

T. Kurokawa

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity ◽

Metalorganic Chemical

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Manufacturability of vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition

10.2172/10129730 ◽

1998 ◽

Author(s):

Not Given Author

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Metalorganic Chemical

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Growth of Highly Strained InGaAs Quantum Wells by Metalorganic Chemical Vapor Deposition with Application to Vertical-Cavity Surface-Emitting Laser

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.l54 ◽

2006 ◽

Vol 45 (No. 2) ◽

pp. L54-L56 ◽

Cited By ~ 1

Author(s):

I-Liang Chen ◽

Wei-Chou Hsu ◽

Tsin-Dong Lee ◽

Hao-Chung Kuo ◽

Ke-Hua Su ◽

...

Keyword(s):

Quantum Wells ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Highly Strained ◽

Vertical Cavity ◽

Metalorganic Chemical

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Al Contamination in InGaAsN Quantum Wells Grown by Metalorganic Chemical Vapor Deposition and 1.3 µm InGaAsN Vertical Cavity Surface Emitting Lasers

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.1260 ◽

2004 ◽

Vol 43 (4A) ◽

pp. 1260-1263 ◽

Cited By ~ 12

Author(s):

Tetsuya Takeuchi ◽

Ying-Lan Chang ◽

Michael Leary ◽

Dan Mars ◽

Yoon Kyu Song ◽

...

Keyword(s):

Quantum Wells ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Metalorganic Chemical

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In-SituMonitoring of In0.53Al0.13Ga0.34As/In0.52Al0.48As 1.55 µm Vertical Cavity Surface Emitting Laser Structure Grown by Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.2707 ◽

1999 ◽

Vol 38 (Part 1, No. 5A) ◽

pp. 2707-2709 ◽

Cited By ~ 2

Author(s):

Jong-Hyeob Baek ◽

Bun Lee ◽

Won Seok Han ◽

Hyung Koun Cho ◽

Jason M. Smith ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Cavity Surface ◽

Vertical Cavity Surface ◽

Metal Organic ◽

Surface Emitting Laser ◽

Organic Chemical Vapor Deposition ◽

Vertical Cavity

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Drastic improvement of Zn doping characteristics in p-AlAs grown by metalorganic chemical vapor deposition for low-resistance vertical-cavity surface-emitting lasers

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91160-6 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 898-901

Author(s):

T. Mukaihara ◽

H. Maekawa ◽

Y. Hayashi ◽

N. Ohnoki ◽

F. Koyama ◽

...

Keyword(s):

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Cavity Surface ◽

Zn Doping ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Metalorganic Chemical

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First Room-Temperature Continuous-Wave Operation of Self-Formed InGaAs Quantum Dot-Like Laser on Si substrate Grown by Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.3860 ◽

2000 ◽

Vol 39 (Part 1, No. 7A) ◽

pp. 3860-3862 ◽

Cited By ~ 9

Author(s):

Zaman Iqbal Kazi ◽

Takashi Egawa ◽

Takashi Jimbo ◽

Masayoshi Umeno

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Dot ◽

Vapor Deposition ◽

Room Temperature ◽

Metalorganic Chemical Vapor Deposition ◽

Continuous Wave ◽

Chemical Vapor ◽

Si Substrate ◽

Continuous Wave Operation ◽

Metalorganic Chemical

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Applications of vertical cavity surface emitting lasers for low-pressure chemical vapor deposition reactors

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2019.06.078 ◽

2019 ◽

Vol 141 ◽

pp. 245-255 ◽

Cited By ~ 1

Author(s):

Youngsu Noh ◽

Yoonsuk Kim ◽

Seungho Park ◽

Byung-Kuk Kim ◽

Hyoung June Kim

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Pressure Chemical ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Reduction of Stress in GaAs with In-Doped GaAs Intermediate Layer Grown on Si Substrate by Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.3808 ◽

1992 ◽

Vol 31 (Part 1, No. 12A) ◽

pp. 3808-3811 ◽

Cited By ~ 2

Author(s):

Eiji Yamaichi ◽

Sachiko Onozawa ◽

Takashi Ueda ◽

Chouho Yamagishi ◽

Masahiro Akiyama

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Intermediate Layer ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Si Substrate ◽

Metalorganic Chemical

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