Spatio temporal Variation of the Density Distributions in Ar RF Plasmas Using the Monte Carlo Simulation/Legendre Polynomial Weighted Sampling Method
2003 ◽
Vol 42
(Part 1, No. 3)
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pp. 1445-1451
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2011 ◽
Vol 88-89
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pp. 554-558
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2018 ◽
Vol 7
(2)
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pp. 80
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2010 ◽
Vol 132
(11)
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2012 ◽
Vol 27
(06)
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pp. 1250037
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2020 ◽
Vol 34
(5)
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pp. 316-324
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2020 ◽
Vol 234
(4)
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pp. 622-635