Energy-Filtered Secondary-Electron Imaging for Nanoscale Dopant Mapping by Applying a Reverse Bias Voltage
2012 ◽
Vol 51
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pp. 106503
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Keyword(s):
2012 ◽
Vol 51
(10R)
◽
pp. 106503
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2000 ◽
Vol 15
(7)
◽
pp. 752-755
◽
Keyword(s):
Keyword(s):