Attention Mechanism Driven YOLOv3 on FPGA Acceleration for Efficient Vision Based Defect Inspection

2021 ◽  
Author(s):  
Longzhen Yu ◽  
Qian Zhao ◽  
Zhixian Wang
2020 ◽  
Vol 140 (12) ◽  
pp. 1393-1401
Author(s):  
Hiroki Chinen ◽  
Hidehiro Ohki ◽  
Keiji Gyohten ◽  
Toshiya Takami

Author(s):  
Mike Santana ◽  
Alfredo V. Herrera

Abstract This paper describes a methodology for correlating physical defect inspection/navigation systems with electrical bitmap data through the fabrication of artificial defects via reticle alterations or circuit modifications using an inline FIB. The methodology chosen consisted of altering decommissioned reticles to create defects resulting in both open and shorted circuits within areas of an AMD microprocessor cache. The reticles were subsequently scanned using a KLA SL300HR StarLight inspection system to confirm their location, while wafers processed on these reticles were scanned at several layers using standard inline metrology. Finally, the wafers were electrically tested, bitmapped, and physically deprocessed. All defect data was then analyzed and cross-correlated between each system, uncovering some important system deficiencies and learning opportunities. Data and images are included to support the significance and effectiveness of such a methodology.


Author(s):  
Oliver D. Patterson ◽  
Deborah A. Ryan ◽  
Xiaohu Tang ◽  
Shuen Cheng Lei

Abstract In-line E-beam inspection may be used for rapid generation of failure analysis (FA) results for low yielding test structures. This approach provides a number of advantages: 1) It is much earlier than traditional FA, 2) de-processing isn’t required, and 3) a high volume of sites can be processed with the additional support of an in-line FIB. Both physical defect detection and voltage contrast inspection modes are useful for this application. Voltage contrast mode is necessary for isolation of buried defects and is the preferred approach for opens, because it is faster. Physical defect detection mode is generally necessary to locate shorts. The considerations in applying these inspection modes for rapid failure analysis are discussed in the context of two examples: one that lends itself to physical defect inspection and the other, more appropriately addressed with voltage contrast inspection.


Author(s):  
C. Monachon ◽  
M.S. Zielinski ◽  
D. Gachet ◽  
S. Sonderegger ◽  
S. Muckenhirn ◽  
...  

Abstract Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over large field of view with a spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission opens a new pathway in non-destructive failure and defect analysis at the nanometer scale. Here we present application of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials


2021 ◽  
Vol 11 (14) ◽  
pp. 6625
Author(s):  
Yan Su ◽  
Kailiang Weng ◽  
Chuan Lin ◽  
Zeqin Chen

An accurate dam deformation prediction model is vital to a dam safety monitoring system, as it helps assess and manage dam risks. Most traditional dam deformation prediction algorithms ignore the interpretation and evaluation of variables and lack qualitative measures. This paper proposes a data processing framework that uses a long short-term memory (LSTM) model coupled with an attention mechanism to predict the deformation response of a dam structure. First, the random forest (RF) model is introduced to assess the relative importance of impact factors and screen input variables. Secondly, the density-based spatial clustering of applications with noise (DBSCAN) method is used to identify and filter the equipment based abnormal values to reduce the random error in the measurements. Finally, the coupled model is used to focus on important factors in the time dimension in order to obtain more accurate nonlinear prediction results. The results of the case study show that, of all tested methods, the proposed coupled method performed best. In addition, it was found that temperature and water level both have significant impacts on dam deformation and can serve as reliable metrics for dam management.


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