Electron-Beam-Induced Currents in Semiconductors

1981 ◽  
Vol 11 (1) ◽  
pp. 353-380 ◽  
Author(s):  
J I Hanoka ◽  
R O Bell
2002 ◽  
Vol 738 ◽  
Author(s):  
Ralf Heiderhoff ◽  
Ingo Joachimsthaler ◽  
Ludwig J. Balk

ABSTRACTSPM/SEM-hybridsystems are more than only a combination of complementary microscopy techniques, because the used probes can simultaneously either be used as sensors, which give access to a vast variety of material properties, or as actuators, which can deliberately modify samples properties. The wide application field as well as flexibility is demonstrated exemplarily on techniques in microanalyses like nano-probing, cathodoluminescence, electron beam induced currents, and thermal analyses. These results provide an interesting perspective with respect to failure analyses and reliability of modern materials and devices.


2007 ◽  
Vol 515 (15) ◽  
pp. 6163-6167 ◽  
Author(s):  
Robert Kniese ◽  
Michael Powalla ◽  
Uwe Rau

2010 ◽  
Vol 54 (8) ◽  
pp. 777-780 ◽  
Author(s):  
Myung-Geun Han ◽  
Yimei Zhu ◽  
Katsuhiro Sasaki ◽  
Takeharu Kato ◽  
Craig A.J. Fisher ◽  
...  

2017 ◽  
Vol 8 (1) ◽  
Author(s):  
Brian D. Hoskins ◽  
Gina C. Adam ◽  
Evgheni Strelcov ◽  
Nikolai Zhitenev ◽  
Andrei Kolmakov ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document